Blistering behavior in Mo/Si multilayers

A.S. Kuznetsov; M.A. Gleeson; R.W.E. van de Kruijs; F. Bijkerk

doi:10.1117/12.887326

Blistering behavior in Mo/Si multilayers

A.S. Kuznetsov, M.A. Gleeson, R.W.E. van de Kruijs, F. Bijkerk

Laser Physics & Nonlinear Optics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

8 Citations (Scopus)

15 Downloads (Pure)

Abstract

This paper is concerned with mapping the characteristics of blistering induced on Mo/Si multilayers as a result of irradiation by hydrogen species generated in a thermal capillary cracker. The nature and extent of the damage observed is dependent on exposure conditions such as the sample temperature, the hydrogen isotope used and the total fluence. Increasing the sample temperature leads to fewer but larger blisters. When D2 is used as the working gas, blisters are ~5 times smaller in diameter than in the case of H2 exposure, but more blisters are formed. Increasing the gas flow induces more and bigger blisters andblisters were observed to develop in two distinct size distributions.

Original language	English
Title of host publication	SPIE Optics + Optoelectronics 2011
Editors	A.S. Kuznetsov
Publisher	SPIE
Number of pages	6
DOIs	https://doi.org/10.1117/12.887326
Publication status	Published - 18 Apr 2011
Event	SPIE Optics + Optoelectronics 2011 - Prague Congress Centre, Prague, Czech Republic Duration: 18 Apr 2011 → 20 Apr 2011 https://spie.org/conferences-and-exhibitions/past-conferences-and-exhibitions/optics-and-optoelectronics-2011

Publication series

Name	Proceedings of SPIE
Publisher	SPIE
Volume	8077
ISSN (Print)	0277-786X

Conference

Conference	SPIE Optics + Optoelectronics 2011
Country/Territory	Czech Republic
City	Prague
Period	18/04/11 → 20/04/11
Internet address	https://spie.org/conferences-and-exhibitions/past-conferences-and-exhibitions/optics-and-optoelectronics-2011

Keywords

METIS-283336

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10.1117/12.887326

Cite this

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title = "Blistering behavior in Mo/Si multilayers",

abstract = "This paper is concerned with mapping the characteristics of blistering induced on Mo/Si multilayers as a result of irradiation by hydrogen species generated in a thermal capillary cracker. The nature and extent of the damage observed is dependent on exposure conditions such as the sample temperature, the hydrogen isotope used and the total fluence. Increasing the sample temperature leads to fewer but larger blisters. When D2 is used as the working gas, blisters are ~5 times smaller in diameter than in the case of H2 exposure, but more blisters are formed. Increasing the gas flow induces more and bigger blisters andblisters were observed to develop in two distinct size distributions.",

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author = "A.S. Kuznetsov and M.A. Gleeson and {van de Kruijs}, R.W.E. and F. Bijkerk",

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AU - Kuznetsov, A.S.

AU - Gleeson, M.A.

AU - van de Kruijs, R.W.E.

AU - Bijkerk, F.

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Y1 - 2011/4/18

N2 - This paper is concerned with mapping the characteristics of blistering induced on Mo/Si multilayers as a result of irradiation by hydrogen species generated in a thermal capillary cracker. The nature and extent of the damage observed is dependent on exposure conditions such as the sample temperature, the hydrogen isotope used and the total fluence. Increasing the sample temperature leads to fewer but larger blisters. When D2 is used as the working gas, blisters are ~5 times smaller in diameter than in the case of H2 exposure, but more blisters are formed. Increasing the gas flow induces more and bigger blisters andblisters were observed to develop in two distinct size distributions.

AB - This paper is concerned with mapping the characteristics of blistering induced on Mo/Si multilayers as a result of irradiation by hydrogen species generated in a thermal capillary cracker. The nature and extent of the damage observed is dependent on exposure conditions such as the sample temperature, the hydrogen isotope used and the total fluence. Increasing the sample temperature leads to fewer but larger blisters. When D2 is used as the working gas, blisters are ~5 times smaller in diameter than in the case of H2 exposure, but more blisters are formed. Increasing the gas flow induces more and bigger blisters andblisters were observed to develop in two distinct size distributions.

KW - METIS-283336

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DO - 10.1117/12.887326

M3 - Conference contribution

T3 - Proceedings of SPIE

BT - SPIE Optics + Optoelectronics 2011

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PB - SPIE

T2 - SPIE Optics + Optoelectronics 2011

Y2 - 18 April 2011 through 20 April 2011

ER -

Blistering behavior in Mo/Si multilayers

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