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Bond strength tests between silicon wafers and duran tubes (fusion bonded fluidic interconnects)
- I. Fazal
- , Johan W. Berenschot
- , J.H. de Boer
- , Henricus V. Jansen
- , Michael Curt Elwenspoek
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
6
Citations
(Scopus)
619
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