Bonding and etching techniques for precision frabrication of reliable microvalves

R.E. Oosterbroek, C. Gui, Johan W. Berenschot, Stefan Schlautmann, Theodorus S.J. Lammerink, Michael Curt Elwenspoek, Albert van den Berg

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of MicroTAS 2000 conference
    Place of PublicationEnschede
    Pages179-182
    Publication statusPublished - 14 May 2000
    Event4th International Conference on Micro Total Analysis Systems, µTAS 2000 - Enschede, Netherlands
    Duration: 14 May 200018 May 2000
    Conference number: 4

    Conference

    Conference4th International Conference on Micro Total Analysis Systems, µTAS 2000
    Abbreviated titleMicroTAS
    CountryNetherlands
    CityEnschede
    Period14/05/0018/05/00

    Keywords

    • METIS-113063
    • IR-16178

    Cite this