Original language | Undefined |
---|---|
Title of host publication | 4th International Conference Micro System Technology |
Place of Publication | Berlin, Germany |
Pages | 879-887 |
Publication status | Published - 19 Oct 1994 |
Keywords
- METIS-114094
V.L. Spiering, V. Gass, S. Jeanneret, N.F. de Rooij, K.H. Widmer, B. Zurfluh, E. Morscher
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Original language | Undefined |
---|---|
Title of host publication | 4th International Conference Micro System Technology |
Place of Publication | Berlin, Germany |
Pages | 879-887 |
Publication status | Published - 19 Oct 1994 |