Borosilicate glass (DURAN®) tubes as micro-fluidic interconnects

B. Mogulkoc; Henricus V. Jansen; Hermanus J.M. ter Brake; Michael Curt Elwenspoek

Borosilicate glass (DURAN®) tubes as micro-fluidic interconnects

B. Mogulkoc, Henricus V. Jansen, Hermanus J.M. ter Brake, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

Capillary bonding of glass tubes to silicon wafers has been elaborated. After proper preparation, tubes are placed on silicon substrates and specimens are annealed at sintering temperatures of glass. The resulting interconnect is capable of working above 70 bars of filling pressure and the bond is completely hermetic. However, due to high temperature annealing in air, surface devitrification has been observed on glass, which can be avoided by vacuum annealing

Original language	Undefined
Title of host publication	Proceedings of the 19th micromechanics Europe conference
Place of Publication	Italy
Publisher	VDI/VDE
Pages	-
Number of pages	4
ISBN (Print)	978-3-00-025529-8
Publication status	Published - Sept 2008
Event	19th MicroMechanics Europe Workshop, MME 2008 - Aachen, Germany Duration: 28 Sept 2008 → 30 Sept 2008 Conference number: 19

Publication series

Name
Publisher	VDI/VDE

Workshop

Workshop	19th MicroMechanics Europe Workshop, MME 2008
Abbreviated title	MME
Country/Territory	Germany
City	Aachen
Period	28/09/08 → 30/09/08

Keywords

EWI-14744
METIS-255430
IR-65256

Access to Document

Cite this

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title = "Borosilicate glass (DURAN{\textregistered}) tubes as micro-fluidic interconnects",

abstract = "Capillary bonding of glass tubes to silicon wafers has been elaborated. After proper preparation, tubes are placed on silicon substrates and specimens are annealed at sintering temperatures of glass. The resulting interconnect is capable of working above 70 bars of filling pressure and the bond is completely hermetic. However, due to high temperature annealing in air, surface devitrification has been observed on glass, which can be avoided by vacuum annealing",

keywords = "EWI-14744, METIS-255430, IR-65256",

author = "B. Mogulkoc and Jansen, {Henricus V.} and {ter Brake}, {Hermanus J.M.} and Elwenspoek, {Michael Curt}",

note = "http://eprints.ewi.utwente.nl/14744 ; 19th MicroMechanics Europe Workshop, MME 2008 ; Conference date: 28-09-2008 Through 30-09-2008",

year = "2008",

month = sep,

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T1 - Borosilicate glass (DURAN®) tubes as micro-fluidic interconnects

AU - Mogulkoc, B.

AU - Jansen, Henricus V.

AU - ter Brake, Hermanus J.M.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 19

PY - 2008/9

Y1 - 2008/9

N2 - Capillary bonding of glass tubes to silicon wafers has been elaborated. After proper preparation, tubes are placed on silicon substrates and specimens are annealed at sintering temperatures of glass. The resulting interconnect is capable of working above 70 bars of filling pressure and the bond is completely hermetic. However, due to high temperature annealing in air, surface devitrification has been observed on glass, which can be avoided by vacuum annealing

AB - Capillary bonding of glass tubes to silicon wafers has been elaborated. After proper preparation, tubes are placed on silicon substrates and specimens are annealed at sintering temperatures of glass. The resulting interconnect is capable of working above 70 bars of filling pressure and the bond is completely hermetic. However, due to high temperature annealing in air, surface devitrification has been observed on glass, which can be avoided by vacuum annealing

KW - EWI-14744

KW - METIS-255430

KW - IR-65256

M3 - Conference contribution

SN - 978-3-00-025529-8

SP - -

BT - Proceedings of the 19th micromechanics Europe conference

PB - VDI/VDE

CY - Italy

T2 - 19th MicroMechanics Europe Workshop, MME 2008

Y2 - 28 September 2008 through 30 September 2008

ER -