Borosilicate glass (DURAN®) tubes as micro-fluidic interconnects

B. Mogulkoc, Henricus V. Jansen, Hermanus J.M. ter Brake, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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    Abstract

    Capillary bonding of glass tubes to silicon wafers has been elaborated. After proper preparation, tubes are placed on silicon substrates and specimens are annealed at sintering temperatures of glass. The resulting interconnect is capable of working above 70 bars of filling pressure and the bond is completely hermetic. However, due to high temperature annealing in air, surface devitrification has been observed on glass, which can be avoided by vacuum annealing
    Original languageUndefined
    Title of host publicationProceedings of the 19th micromechanics Europe conference
    Place of PublicationItaly
    PublisherVDI/VDE
    Pages-
    Number of pages4
    ISBN (Print)978-3-00-025529-8
    Publication statusPublished - Sep 2008
    Event19th MicroMechanics Europe Workshop, MME 2008 - Aachen, Germany
    Duration: 28 Sep 200830 Sep 2008
    Conference number: 19

    Publication series

    Name
    PublisherVDI/VDE

    Workshop

    Workshop19th MicroMechanics Europe Workshop, MME 2008
    Abbreviated titleMME
    CountryGermany
    CityAachen
    Period28/09/0830/09/08

    Keywords

    • EWI-14744
    • METIS-255430
    • IR-65256

    Cite this

    Mogulkoc, B., Jansen, H. V., ter Brake, H. J. M., & Elwenspoek, M. C. (2008). Borosilicate glass (DURAN®) tubes as micro-fluidic interconnects. In Proceedings of the 19th micromechanics Europe conference (pp. -). Italy: VDI/VDE.