Bottom Electrode Optimization for Piezoelectric Thin Film Based Active Wafer Tables

Research output: Contribution to conference › Poster › Academic

Original language	English
Publication status	Published - 2023
Event	MESA+ Meeting 2023 - Kinepolis, Enschede, Netherlands Duration: 25 Sept 2023 → 25 Sept 2023

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This output contributes to the following UN Sustainable Development Goals (SDGs)

@conference{630e6599907f49a3b65ef911ab5090e7,

title = "Bottom Electrode Optimization for Piezoelectric Thin Film Based Active Wafer Tables",

author = "Ertuğ {\c S}im{\c s}ek and Bas Jansen and Muharrem Bayraktar and Marcelo Ackermann",

year = "2023",

language = "English",

note = "MESA+ Meeting 2023 ; Conference date: 25-09-2023 Through 25-09-2023",

}