Bragg gratings in Al2O3 channel waveguides by focused ion beam milling

F. Ay, J. Bradley, R.M. de Ridder, Markus Pollnau

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

We report on utilization and optimization of the focused ion beam technique for fabrication of nano-structures on $Al_2O_3$ channel waveguides for applications in integrated photonic devices. In particular, investigation of the effects of parameters such as ion beam current, dwell time, scanning strategy, and dielectric charging effects are addressed. As a result of optimization of these parameters, excellent quality gratings with smooth and uniform sidewalls are reported. The effects of Ga ion implantation during the milling process on the optical performance of the devices are discussed.
Original languageUndefined
Title of host publicationProceedings of the 13th Annual Symposium of the IEEE LEOS Benelux Chapter
EditorsKerstin Worhoff, L. Agazzi, N. Ismail, X Leijtens
Place of PublicationEnschede, The Netherlands
PublisherIEEE/LEOS Benelux Chapter
Pages215-217
Number of pages2
ISBN (Print)978-90-365-2768-2
Publication statusPublished - 27 Nov 2008
Event13th Annual Symposium of the IEEE/LEOS Benelux Chapter 2008 - Enschede, Netherlands
Duration: 27 Nov 200828 Nov 2008
Conference number: 13

Publication series

Name
PublisherIEEE Benelux Photonics Society
Number2008/16200

Conference

Conference13th Annual Symposium of the IEEE/LEOS Benelux Chapter 2008
CountryNetherlands
CityEnschede
Period27/11/0828/11/08

Keywords

  • IOMS-APD: Active Photonic Devices
  • EWI-14850
  • METIS-255106
  • IR-62685
  • EC Grant Agreement nr.: FP6/017501

Cite this

Ay, F., Bradley, J., de Ridder, R. M., & Pollnau, M. (2008). Bragg gratings in Al2O3 channel waveguides by focused ion beam milling. In K. Worhoff, L. Agazzi, N. Ismail, & X. Leijtens (Eds.), Proceedings of the 13th Annual Symposium of the IEEE LEOS Benelux Chapter (pp. 215-217). Enschede, The Netherlands: IEEE/LEOS Benelux Chapter.
Ay, F. ; Bradley, J. ; de Ridder, R.M. ; Pollnau, Markus. / Bragg gratings in Al2O3 channel waveguides by focused ion beam milling. Proceedings of the 13th Annual Symposium of the IEEE LEOS Benelux Chapter. editor / Kerstin Worhoff ; L. Agazzi ; N. Ismail ; X Leijtens. Enschede, The Netherlands : IEEE/LEOS Benelux Chapter, 2008. pp. 215-217
@inproceedings{e87aac4a7827444d8e0402f8b2af8680,
title = "Bragg gratings in Al2O3 channel waveguides by focused ion beam milling",
abstract = "We report on utilization and optimization of the focused ion beam technique for fabrication of nano-structures on $Al_2O_3$ channel waveguides for applications in integrated photonic devices. In particular, investigation of the effects of parameters such as ion beam current, dwell time, scanning strategy, and dielectric charging effects are addressed. As a result of optimization of these parameters, excellent quality gratings with smooth and uniform sidewalls are reported. The effects of Ga ion implantation during the milling process on the optical performance of the devices are discussed.",
keywords = "IOMS-APD: Active Photonic Devices, EWI-14850, METIS-255106, IR-62685, EC Grant Agreement nr.: FP6/017501",
author = "F. Ay and J. Bradley and {de Ridder}, R.M. and Markus Pollnau",
year = "2008",
month = "11",
day = "27",
language = "Undefined",
isbn = "978-90-365-2768-2",
publisher = "IEEE/LEOS Benelux Chapter",
number = "2008/16200",
pages = "215--217",
editor = "Kerstin Worhoff and L. Agazzi and N. Ismail and X Leijtens",
booktitle = "Proceedings of the 13th Annual Symposium of the IEEE LEOS Benelux Chapter",

}

Ay, F, Bradley, J, de Ridder, RM & Pollnau, M 2008, Bragg gratings in Al2O3 channel waveguides by focused ion beam milling. in K Worhoff, L Agazzi, N Ismail & X Leijtens (eds), Proceedings of the 13th Annual Symposium of the IEEE LEOS Benelux Chapter. IEEE/LEOS Benelux Chapter, Enschede, The Netherlands, pp. 215-217, 13th Annual Symposium of the IEEE/LEOS Benelux Chapter 2008, Enschede, Netherlands, 27/11/08.

Bragg gratings in Al2O3 channel waveguides by focused ion beam milling. / Ay, F.; Bradley, J.; de Ridder, R.M.; Pollnau, Markus.

Proceedings of the 13th Annual Symposium of the IEEE LEOS Benelux Chapter. ed. / Kerstin Worhoff; L. Agazzi; N. Ismail; X Leijtens. Enschede, The Netherlands : IEEE/LEOS Benelux Chapter, 2008. p. 215-217.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Bragg gratings in Al2O3 channel waveguides by focused ion beam milling

AU - Ay, F.

AU - Bradley, J.

AU - de Ridder, R.M.

AU - Pollnau, Markus

PY - 2008/11/27

Y1 - 2008/11/27

N2 - We report on utilization and optimization of the focused ion beam technique for fabrication of nano-structures on $Al_2O_3$ channel waveguides for applications in integrated photonic devices. In particular, investigation of the effects of parameters such as ion beam current, dwell time, scanning strategy, and dielectric charging effects are addressed. As a result of optimization of these parameters, excellent quality gratings with smooth and uniform sidewalls are reported. The effects of Ga ion implantation during the milling process on the optical performance of the devices are discussed.

AB - We report on utilization and optimization of the focused ion beam technique for fabrication of nano-structures on $Al_2O_3$ channel waveguides for applications in integrated photonic devices. In particular, investigation of the effects of parameters such as ion beam current, dwell time, scanning strategy, and dielectric charging effects are addressed. As a result of optimization of these parameters, excellent quality gratings with smooth and uniform sidewalls are reported. The effects of Ga ion implantation during the milling process on the optical performance of the devices are discussed.

KW - IOMS-APD: Active Photonic Devices

KW - EWI-14850

KW - METIS-255106

KW - IR-62685

KW - EC Grant Agreement nr.: FP6/017501

M3 - Conference contribution

SN - 978-90-365-2768-2

SP - 215

EP - 217

BT - Proceedings of the 13th Annual Symposium of the IEEE LEOS Benelux Chapter

A2 - Worhoff, Kerstin

A2 - Agazzi, L.

A2 - Ismail, N.

A2 - Leijtens, X

PB - IEEE/LEOS Benelux Chapter

CY - Enschede, The Netherlands

ER -

Ay F, Bradley J, de Ridder RM, Pollnau M. Bragg gratings in Al2O3 channel waveguides by focused ion beam milling. In Worhoff K, Agazzi L, Ismail N, Leijtens X, editors, Proceedings of the 13th Annual Symposium of the IEEE LEOS Benelux Chapter. Enschede, The Netherlands: IEEE/LEOS Benelux Chapter. 2008. p. 215-217