Broad temperature range measurements on capacitive MEMS

M.C. van Essen, L.J. Fernandez, J. Sesé, Remco J. Wiegerink, Horst Rogalla, Jakob Flokstra

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 14 Dec 2004
    EventFOM dagen 2004 - Veldhoven, Netherlands
    Duration: 8 Nov 20049 Nov 2004

    Conference

    ConferenceFOM dagen 2004
    CountryNetherlands
    CityVeldhoven
    Period8/11/049/11/04

    Keywords

    • METIS-219829

    Cite this

    van Essen, M. C., Fernandez, L. J., Sesé, J., Wiegerink, R. J., Rogalla, H., & Flokstra, J. (2004). Broad temperature range measurements on capacitive MEMS. -. Poster session presented at FOM dagen 2004, Veldhoven, Netherlands.