Broad temperature range measurements on capacitive MEMS

M.C. van Essen, L.J. Fernandez, J. Sesé, Remco J. Wiegerink, Horst Rogalla, Jakob Flokstra

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 14 Dec 2004
    EventFOM dagen 2004 - Veldhoven, Netherlands
    Duration: 8 Nov 20049 Nov 2004

    Conference

    ConferenceFOM dagen 2004
    CountryNetherlands
    CityVeldhoven
    Period8/11/049/11/04

    Keywords

    • METIS-219829

    Cite this

    van Essen, M. C., Fernandez, L. J., Sesé, J., Wiegerink, R. J., Rogalla, H., & Flokstra, J. (2004). Broad temperature range measurements on capacitive MEMS. -. Poster session presented at FOM dagen 2004, Veldhoven, Netherlands.
    van Essen, M.C. ; Fernandez, L.J. ; Sesé, J. ; Wiegerink, Remco J. ; Rogalla, Horst ; Flokstra, Jakob. / Broad temperature range measurements on capacitive MEMS. Poster session presented at FOM dagen 2004, Veldhoven, Netherlands.
    @conference{aef71130665a4689a83f2f042529ce97,
    title = "Broad temperature range measurements on capacitive MEMS",
    keywords = "METIS-219829",
    author = "{van Essen}, M.C. and L.J. Fernandez and J. Ses{\'e} and Wiegerink, {Remco J.} and Horst Rogalla and Jakob Flokstra",
    year = "2004",
    month = "12",
    day = "14",
    language = "Undefined",
    pages = "--",
    note = "null ; Conference date: 08-11-2004 Through 09-11-2004",

    }

    van Essen, MC, Fernandez, LJ, Sesé, J, Wiegerink, RJ, Rogalla, H & Flokstra, J 2004, 'Broad temperature range measurements on capacitive MEMS' FOM dagen 2004, Veldhoven, Netherlands, 8/11/04 - 9/11/04, pp. -.

    Broad temperature range measurements on capacitive MEMS. / van Essen, M.C.; Fernandez, L.J.; Sesé, J.; Wiegerink, Remco J.; Rogalla, Horst; Flokstra, Jakob.

    2004. - Poster session presented at FOM dagen 2004, Veldhoven, Netherlands.

    Research output: Contribution to conferencePoster

    TY - CONF

    T1 - Broad temperature range measurements on capacitive MEMS

    AU - van Essen, M.C.

    AU - Fernandez, L.J.

    AU - Sesé, J.

    AU - Wiegerink, Remco J.

    AU - Rogalla, Horst

    AU - Flokstra, Jakob

    PY - 2004/12/14

    Y1 - 2004/12/14

    KW - METIS-219829

    M3 - Poster

    SP - -

    ER -

    van Essen MC, Fernandez LJ, Sesé J, Wiegerink RJ, Rogalla H, Flokstra J. Broad temperature range measurements on capacitive MEMS. 2004. Poster session presented at FOM dagen 2004, Veldhoven, Netherlands.