Broadband spectrometer development based on high-density free-standing transmission gratings

Muharrem Bayraktar, Fei Liu, Hubertus M.J. Bastiaens, Caspar Bruineman, Boris Vratzov, Frederik Bijkerk

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Publication statusPublished - 19 Dec 2017
Event304. PTB-Seminar VUV and EUV Metrology - Berlin, Germany
Duration: 19 Oct 201720 Oct 2017

Seminar

Seminar304. PTB-Seminar VUV and EUV Metrology
CountryGermany
CityBerlin
Period19/10/1720/10/17

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