Broadband spectrometer development based on high-density free-standing transmission gratings

Muharrem Bayraktar, Fei Liu, Hubertus M.J. Bastiaens, Caspar Bruineman, Boris Vratzov, Frederik Bijkerk

Research output: Contribution to conference › Poster › Other research output

Original language	English
Publication status	Published - 19 Dec 2017
Event	304th PTB-Seminar VUV and EUV Metrology 2017 - Berlin, Germany Duration: 19 Oct 2017 → 20 Oct 2017 Conference number: 304

Seminar	304th PTB-Seminar VUV and EUV Metrology 2017
Country/Territory	Germany
City	Berlin
Period	19/10/17 → 20/10/17

Cite this

@conference{4d5adbc85068456c9614f57c70ca4a02,

title = "Broadband spectrometer development based on high-density free-standing transmission gratings",

author = "Muharrem Bayraktar and Fei Liu and Bastiaens, {Hubertus M.J.} and Caspar Bruineman and Boris Vratzov and Frederik Bijkerk",

year = "2017",

month = dec,

day = "19",

language = "English",

note = "304th PTB-Seminar VUV and EUV Metrology 2017 ; Conference date: 19-10-2017 Through 20-10-2017",

}

TY - CONF

T1 - Broadband spectrometer development based on high-density free-standing transmission gratings

AU - Bayraktar, Muharrem

AU - Liu, Fei

AU - Bastiaens, Hubertus M.J.

AU - Bruineman, Caspar

AU - Vratzov, Boris

AU - Bijkerk, Frederik

N1 - Conference code: 304

PY - 2017/12/19

Y1 - 2017/12/19

M3 - Poster

T2 - 304th PTB-Seminar VUV and EUV Metrology 2017

Y2 - 19 October 2017 through 20 October 2017

ER -