BSM 3: design, rules, modelling, optimisation and performance of precision position systems for scanning probe, gripping, and other MEMS applications

Henri Jansen; Rudi Verhagen; Miko Elwenspoek

BSM 3: design, rules, modelling, optimisation and performance of precision position systems for scanning probe, gripping, and other MEMS applications

Henri Jansen, Rudi Verhagen, Miko Elwenspoek

Research output: Contribution to conference › Paper › Academic › peer-review

29 Downloads (Pure)

Abstract

In this paper an xy-stage is fully characterised statically as well as dynamically. It is concluded that the axial stress in the beam is the major non-linear effect. Finite element analysis such as COSMOS is used for the validation of the linear mechanical models. Good conformity between theory and simulation is observed. As a result, mathematical programs such as MATHCAD are now sufficient to predict the mechanical behaviour of structures. This has the advantage that parameters of structures can be altered much easier and faster. After optimisation, xy-stages are developed for their use in scanning probe microscopy. Experiments of devices operated in open air and even under fluid show good agreement with theories.

Original language	English
Pages	1-10
Number of pages	10
Publication status	Published - 14 Nov 1994
Event	Seminar on Handling and Assembly of Microparts - Vienna, Austria Duration: 14 Nov 1994 → 14 Nov 1994

Conference

Conference	Seminar on Handling and Assembly of Microparts
Country	Austria
City	Vienna
Period	14/11/94 → 14/11/94

Keywords

Black Silicon Method
BSM

Access to Document

Jansen1994bsm
open
Final published version, 557 KB

Fingerprint Dive into the research topics of 'BSM 3: design, rules, modelling, optimisation and performance of precision position systems for scanning probe, gripping, and other MEMS applications'. Together they form a unique fingerprint.

Cite this

@conference{278807dab70a4f22bfc1cb220d6fdf15,

title = "BSM 3: design, rules, modelling, optimisation and performance of precision position systems for scanning probe, gripping, and other MEMS applications",

abstract = "In this paper an xy-stage is fully characterised statically as well as dynamically. It is concluded that the axial stress in the beam is the major non-linear effect. Finite element analysis such as COSMOS is used for the validation of the linear mechanical models. Good conformity between theory and simulation is observed. As a result, mathematical programs such as MATHCAD are now sufficient to predict the mechanical behaviour of structures. This has the advantage that parameters of structures can be altered much easier and faster. After optimisation, xy-stages are developed for their use in scanning probe microscopy. Experiments of devices operated in open air and even under fluid show good agreement with theories.",

keywords = "Black Silicon Method, BSM",

author = "Henri Jansen and Rudi Verhagen and Miko Elwenspoek",

year = "1994",

month = nov,

day = "14",

language = "English",

pages = "1--10",

note = "Seminar on Handling and Assembly of Microparts ; Conference date: 14-11-1994 Through 14-11-1994",

}

BSM 3: design, rules, modelling, optimisation and performance of precision position systems for scanning probe, gripping, and other MEMS applications. / Jansen, Henri; Verhagen, Rudi; Elwenspoek, Miko.

1994. 1-10 Paper presented at Seminar on Handling and Assembly of Microparts, Vienna, Austria.

Research output: Contribution to conference › Paper › Academic › peer-review

TY - CONF

T1 - BSM 3: design, rules, modelling, optimisation and performance of precision position systems for scanning probe, gripping, and other MEMS applications

AU - Jansen, Henri

AU - Verhagen, Rudi

AU - Elwenspoek, Miko

PY - 1994/11/14

Y1 - 1994/11/14

N2 - In this paper an xy-stage is fully characterised statically as well as dynamically. It is concluded that the axial stress in the beam is the major non-linear effect. Finite element analysis such as COSMOS is used for the validation of the linear mechanical models. Good conformity between theory and simulation is observed. As a result, mathematical programs such as MATHCAD are now sufficient to predict the mechanical behaviour of structures. This has the advantage that parameters of structures can be altered much easier and faster. After optimisation, xy-stages are developed for their use in scanning probe microscopy. Experiments of devices operated in open air and even under fluid show good agreement with theories.

AB - In this paper an xy-stage is fully characterised statically as well as dynamically. It is concluded that the axial stress in the beam is the major non-linear effect. Finite element analysis such as COSMOS is used for the validation of the linear mechanical models. Good conformity between theory and simulation is observed. As a result, mathematical programs such as MATHCAD are now sufficient to predict the mechanical behaviour of structures. This has the advantage that parameters of structures can be altered much easier and faster. After optimisation, xy-stages are developed for their use in scanning probe microscopy. Experiments of devices operated in open air and even under fluid show good agreement with theories.

KW - Black Silicon Method

KW - BSM

M3 - Paper

SP - 1

EP - 10

T2 - Seminar on Handling and Assembly of Microparts

Y2 - 14 November 1994 through 14 November 1994

ER -