BSM 3: design, rules, modelling, optimisation and performance of precision position systems for scanning probe, gripping, and other MEMS applications

Henri Jansen, Rudi Verhagen, Miko Elwenspoek

    Research output: Contribution to conferencePaper

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    Abstract

    In this paper an xy-stage is fully characterised statically as well as dynamically. It is concluded that the axial stress in the beam is the major non-linear effect. Finite element analysis such as COSMOS is used for the validation of the linear mechanical models. Good conformity between theory and simulation is observed. As a result, mathematical programs such as MATHCAD are now sufficient to predict the mechanical behaviour of structures. This has the advantage that parameters of structures can be altered much easier and faster. After optimisation, xy-stages are developed for their use in scanning probe microscopy. Experiments of devices operated in open air and even under fluid show good agreement with theories.
    Original languageEnglish
    Pages1-10
    Number of pages10
    Publication statusPublished - 14 Nov 1994
    EventSeminar on Handling and Assembly of Microparts - Vienna, Austria
    Duration: 14 Nov 199414 Nov 1994

    Conference

    ConferenceSeminar on Handling and Assembly of Microparts
    CountryAustria
    CityVienna
    Period14/11/9414/11/94

    Keywords

    • Black Silicon Method
    • BSM

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    Jansen, H., Verhagen, R., & Elwenspoek, M. (1994). BSM 3: design, rules, modelling, optimisation and performance of precision position systems for scanning probe, gripping, and other MEMS applications. 1-10. Paper presented at Seminar on Handling and Assembly of Microparts, Vienna, Austria.