Buckled membranes for microstructures

D.O. Popescu, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

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    Abstract

    Based on energy variation methods we calculated the deflection of membranes under the combined load of an external pressure and an internal lateral stress. A lateral load gives rise to buckling once a critical load is exceeded. The combination of transversal loads and lateral loads changes the properties of the membrane (and other structures) in the vicinity of the buckling load: The membrane deflects at all lateral loads and the critical load, above which two states are possible shifts. A result important for the design of microsystems, which are based on the buckling phenomenon, is the pressure required to switch the membrane from one state to the other. The theory is tested successfully with micromachined silicon/silicon-dioxide membranes
    Original languageUndefined
    Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Pages188-192
    Number of pages6
    ISBN (Print)0-7803-1833-1
    DOIs
    Publication statusPublished - 25 Jan 1994
    EventIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1994 - Oiso, Japan
    Duration: 25 Jan 199428 Jan 1994
    Conference number: 1994

    Workshop

    WorkshopIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1994
    Abbreviated titleMEMS
    CountryJapan
    CityOiso
    Period25/01/9428/01/94

    Keywords

    • IR-17197
    • METIS-114092
    • EWI-14074

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