Buckled membranes for microstructures

D.O. Popescu; Theodorus S.J. Lammerink; Michael Curt Elwenspoek

doi:10.1109/MEMSYS.1994.555621

Buckled membranes for microstructures

D.O. Popescu, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

27 Citations (Scopus)

195 Downloads (Pure)

Abstract

Based on energy variation methods we calculated the deflection of membranes under the combined load of an external pressure and an internal lateral stress. A lateral load gives rise to buckling once a critical load is exceeded. The combination of transversal loads and lateral loads changes the properties of the membrane (and other structures) in the vicinity of the buckling load: The membrane deflects at all lateral loads and the critical load, above which two states are possible shifts. A result important for the design of microsystems, which are based on the buckling phenomenon, is the pressure required to switch the membrane from one state to the other. The theory is tested successfully with micromachined silicon/silicon-dioxide membranes

Original language	Undefined
Title of host publication	Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Place of Publication	Piscataway
Publisher	IEEE Computer Society
Pages	188-192
Number of pages	6
ISBN (Print)	0-7803-1833-1
DOIs	https://doi.org/10.1109/MEMSYS.1994.555621
Publication status	Published - 25 Jan 1994
Event	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1994 - Oiso, Japan Duration: 25 Jan 1994 → 28 Jan 1994 Conference number: 1994

Workshop

Workshop	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1994
Abbreviated title	MEMS
Country	Japan
City	Oiso
Period	25/01/94 → 28/01/94

Keywords

IR-17197
METIS-114092
EWI-14074

Access to Document

10.1109/MEMSYS.1994.555621

PMEMS_188
open
buckled
open

Cite this

@inproceedings{b3d4268e84794c368667560abe0c3296,

title = "Buckled membranes for microstructures",

abstract = "Based on energy variation methods we calculated the deflection of membranes under the combined load of an external pressure and an internal lateral stress. A lateral load gives rise to buckling once a critical load is exceeded. The combination of transversal loads and lateral loads changes the properties of the membrane (and other structures) in the vicinity of the buckling load: The membrane deflects at all lateral loads and the critical load, above which two states are possible shifts. A result important for the design of microsystems, which are based on the buckling phenomenon, is the pressure required to switch the membrane from one state to the other. The theory is tested successfully with micromachined silicon/silicon-dioxide membranes",

keywords = "IR-17197, METIS-114092, EWI-14074",

author = "D.O. Popescu and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",

year = "1994",

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doi = "10.1109/MEMSYS.1994.555621",

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pages = "188--192",

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T1 - Buckled membranes for microstructures

AU - Popescu, D.O.

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 1994

PY - 1994/1/25

Y1 - 1994/1/25

N2 - Based on energy variation methods we calculated the deflection of membranes under the combined load of an external pressure and an internal lateral stress. A lateral load gives rise to buckling once a critical load is exceeded. The combination of transversal loads and lateral loads changes the properties of the membrane (and other structures) in the vicinity of the buckling load: The membrane deflects at all lateral loads and the critical load, above which two states are possible shifts. A result important for the design of microsystems, which are based on the buckling phenomenon, is the pressure required to switch the membrane from one state to the other. The theory is tested successfully with micromachined silicon/silicon-dioxide membranes

AB - Based on energy variation methods we calculated the deflection of membranes under the combined load of an external pressure and an internal lateral stress. A lateral load gives rise to buckling once a critical load is exceeded. The combination of transversal loads and lateral loads changes the properties of the membrane (and other structures) in the vicinity of the buckling load: The membrane deflects at all lateral loads and the critical load, above which two states are possible shifts. A result important for the design of microsystems, which are based on the buckling phenomenon, is the pressure required to switch the membrane from one state to the other. The theory is tested successfully with micromachined silicon/silicon-dioxide membranes

KW - IR-17197

KW - METIS-114092

KW - EWI-14074

U2 - 10.1109/MEMSYS.1994.555621

DO - 10.1109/MEMSYS.1994.555621

M3 - Conference contribution

SN - 0-7803-1833-1

SP - 188

EP - 192

BT - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

PB - IEEE Computer Society

CY - Piscataway

Y2 - 25 January 1994 through 28 January 1994

ER -