Buckled membranes for microstructures

Dan S. Popescu, Theo S.J. Lammerink, Miko Elwenspoek

    Research output: Contribution to conferencePosterOther research output

    Original languageEnglish
    Number of pages1
    Publication statusPublished - 25 Jan 1994
    EventIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1994 - Oiso, Japan
    Duration: 25 Jan 199428 Jan 1994
    Conference number: 1994

    Workshop

    WorkshopIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1994
    Abbreviated titleMEMS
    Country/TerritoryJapan
    CityOiso
    Period25/01/9428/01/94
    • Buckled membranes for microstructures

      Popescu, D. S., Lammerink, T. S. J. & Elwenspoek, M., 25 Jan 1994, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway, NJ: IEEE, p. 188-192 6 p.

      Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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