Buckled membranes for microstructures

D.O. Popescu, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 25 Jan 1994
    EventIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1994 - Oiso, Japan
    Duration: 25 Jan 199428 Jan 1994
    Conference number: 1994

    Workshop

    WorkshopIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1994
    Abbreviated titleMEMS
    CountryJapan
    CityOiso
    Period25/01/9428/01/94

    Keywords

    • METIS-114645

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