Buckled membranes for microstructures

Research output: Contribution to conference › Poster › Other research output

Original language	English
Number of pages	1
Publication status	Published - 25 Jan 1994
Event	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1994 - Oiso, Japan Duration: 25 Jan 1994 → 28 Jan 1994 Conference number: 1994

Workshop	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1994
Abbreviated title	MEMS
Country/Territory	Japan
City	Oiso
Period	25/01/94 → 28/01/94

Cite this

@conference{35c13cfa0b8c4fd48e2c5d2485ccf5a9,

title = "Buckled membranes for microstructures",

author = "Popescu, \{Dan S.\} and Lammerink, \{Theo S.J.\} and Miko Elwenspoek",

year = "1994",

month = jan,

day = "25",

language = "English",

note = "IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1994, MEMS ; Conference date: 25-01-1994 Through 28-01-1994",

}