Buckled membranes for microstructures

D.S. Popescu; Theo S.J. Lammerink; Miko Elwenspoek

doi:10.1109/MEMSYS.1994.555621

Buckled membranes for microstructures

D.S. Popescu
, Theo S.J. Lammerink
, Miko Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

31 Citations (Scopus)

552 Downloads (Pure)

Abstract

Based on energy variation methods we calculated the deflection of membranes under the combined load of an external pressure and an internal lateral stress. A lateral load gives rise to buckling once a critical load is exceeded. The combination of transversal loads and lateral loads changes the properties of the membrane (and other structures) in the vicinity of the buckling load: The membrane deflects at all lateral loads and the critical load, above which two states are possible shifts. A result important for the design of microsystems, which are based on the buckling phenomenon, is the pressure required to switch the membrane from one state to the other. The theory is tested successfully with micromachined silicon/silicon-dioxide membranes

Original language	English
Title of host publication	Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	188-192
Number of pages	6
ISBN (Print)	0-7803-1833-1
DOIs	https://doi.org/10.1109/MEMSYS.1994.555621
Publication status	Published - 25 Jan 1994
Event	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1994 - Oiso, Japan Duration: 25 Jan 1994 → 28 Jan 1994 Conference number: 1994

Workshop

Workshop	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1994
Abbreviated title	MEMS
Country/Territory	Japan
City	Oiso
Period	25/01/94 → 28/01/94

Access to Document

10.1109/MEMSYS.1994.555621

ArticleFinal published version, 398 KB

31 Citations
1 Poster

Buckled membranes for microstructures
Popescu, D. S., Lammerink, T. S. J. & Elwenspoek, M., 25 Jan 1994. 1 p.
Research output: Contribution to conference › Poster › Other research output

Cite this

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title = "Buckled membranes for microstructures",

abstract = "Based on energy variation methods we calculated the deflection of membranes under the combined load of an external pressure and an internal lateral stress. A lateral load gives rise to buckling once a critical load is exceeded. The combination of transversal loads and lateral loads changes the properties of the membrane (and other structures) in the vicinity of the buckling load: The membrane deflects at all lateral loads and the critical load, above which two states are possible shifts. A result important for the design of microsystems, which are based on the buckling phenomenon, is the pressure required to switch the membrane from one state to the other. The theory is tested successfully with micromachined silicon/silicon-dioxide membranes",

author = "D.S. Popescu and Lammerink, \{Theo S.J.\} and Miko Elwenspoek",

year = "1994",

month = jan,

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doi = "10.1109/MEMSYS.1994.555621",

language = "English",

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pages = "188--192",

booktitle = "Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)",

publisher = "IEEE",

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note = "IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1994, MEMS ; Conference date: 25-01-1994 Through 28-01-1994",

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T1 - Buckled membranes for microstructures

AU - Popescu, D.S.

AU - Lammerink, Theo S.J.

AU - Elwenspoek, Miko

N1 - Conference code: 1994

PY - 1994/1/25

Y1 - 1994/1/25

N2 - Based on energy variation methods we calculated the deflection of membranes under the combined load of an external pressure and an internal lateral stress. A lateral load gives rise to buckling once a critical load is exceeded. The combination of transversal loads and lateral loads changes the properties of the membrane (and other structures) in the vicinity of the buckling load: The membrane deflects at all lateral loads and the critical load, above which two states are possible shifts. A result important for the design of microsystems, which are based on the buckling phenomenon, is the pressure required to switch the membrane from one state to the other. The theory is tested successfully with micromachined silicon/silicon-dioxide membranes

AB - Based on energy variation methods we calculated the deflection of membranes under the combined load of an external pressure and an internal lateral stress. A lateral load gives rise to buckling once a critical load is exceeded. The combination of transversal loads and lateral loads changes the properties of the membrane (and other structures) in the vicinity of the buckling load: The membrane deflects at all lateral loads and the critical load, above which two states are possible shifts. A result important for the design of microsystems, which are based on the buckling phenomenon, is the pressure required to switch the membrane from one state to the other. The theory is tested successfully with micromachined silicon/silicon-dioxide membranes

U2 - 10.1109/MEMSYS.1994.555621

DO - 10.1109/MEMSYS.1994.555621

M3 - Conference contribution

SN - 0-7803-1833-1

SP - 188

EP - 192

BT - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

PB - IEEE

CY - Piscataway, NJ

T2 - IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1994

Y2 - 25 January 1994 through 28 January 1994

ER -

Buckled membranes for microstructures

Abstract

Workshop

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Research output

Buckled membranes for microstructures

Cite this