Bulk-Si FinFET technology for ultra-high aspect-ratio devices

Vladimir Jovanovic*, Lis K. Nanver, Tomislav Suligoj, Mirko Poljak

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)

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Engineering & Materials Science

Social Sciences