C-axis oriented growth of magnetron sputtered YBaCuO thin films on MgO substrates

B. Häuser, E.G. Keim, H. Rogalla, A. van Silfhout

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Abstract

Highly textured YBaCuO thin films were sputtered on MgO (100)-oriented single crystal substrates at ambient temperature followed by an anneal in oxygen for 1 h at temperatures up to 920 C. X-ray diffractograms of the highly textured films indicate an orientation of the c-axis of the YBaCuO lattice perpendicular to the substrate surface. There are strong indications that the oriented c-axis growth is due to a CuO self-flux effect. Auger measurements reveal a copper diffusion profile into the substrate down to a depth of more than 400 nm.
Original languageEnglish
Pages (from-to)339-341
JournalApplied physics A: Materials science and processing
Volume46
Issue number4
DOIs
Publication statusPublished - 1988

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