Calibrated broadband spectroscopy using transmission gratings in the EUV to DUV wavelengths

Muharrem Bayraktar, H.M.J. Bastiaens, F. Bijkerk

Research output: Contribution to conferencePosterAcademic

15 Downloads (Pure)
Original languageEnglish
Publication statusPublished - 4 Nov 2019
EventEUV Source Workshop 2019 - ARCNL, Amsterdam, Netherlands
Duration: 4 Nov 20196 Nov 2019

Workshop

WorkshopEUV Source Workshop 2019
Country/TerritoryNetherlands
CityAmsterdam
Period4/11/196/11/19

Cite this