In operating a rotating-analyzer ellipsometer one must know the plane of incidence accurately. We present a new calibration method, phase calibration, which is complementary to residue calibration Phase calibration is shown to be superior to the residue method for Δ < π/6 or Δ > 5π/6;.
|Journal||Journal of the Optical Society of America. A: Optics and image science|
|Publication status||Published - 1988|