Abstract
In operating a rotating-analyzer ellipsometer one must know the plane of incidence accurately. We present a new calibration method, phase calibration, which is complementary to residue calibration Phase calibration is shown to be superior to the residue method for Δ < π/6 or Δ > 5π/6;.
| Original language | English |
|---|---|
| Pages (from-to) | 1466 |
| Journal | Journal of the Optical Society of America. A: Optics and image science |
| Volume | 5 |
| Issue number | 9 |
| DOIs | |
| Publication status | Published - 1988 |