Calibration method for rotating-analyzer ellipsometers

J.M.M. de Nijs, A.H.M. Holtslag, A. Hoekstra, Arend van Silfhout

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    Abstract

    In operating a rotating-analyzer ellipsometer one must know the plane of incidence accurately. We present a new calibration method, phase calibration, which is complementary to residue calibration Phase calibration is shown to be superior to the residue method for Δ < π/6 or Δ > 5π/6;.
    Original languageEnglish
    Pages (from-to)1466
    JournalJournal of the Optical Society of America. A: Optics and image science
    Volume5
    Issue number9
    DOIs
    Publication statusPublished - 1988

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