Calibration method for rotating-analyzer ellipsometers

J.M.M. de Nijs; A.H.M. Holtslag; A. Hoekstra; Arend van Silfhout

doi:10.1364/JOSAA.5.001466

Calibration method for rotating-analyzer ellipsometers

J.M.M. de Nijs, A.H.M. Holtslag, A. Hoekstra, Arend van Silfhout

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Abstract

In operating a rotating-analyzer ellipsometer one must know the plane of incidence accurately. We present a new calibration method, phase calibration, which is complementary to residue calibration Phase calibration is shown to be superior to the residue method for Δ < π/6 or Δ > 5π/6;.

Original language	English
Pages (from-to)	1466
Journal	Journal of the Optical Society of America. A: Optics and image science
Volume	5
Issue number	9
DOIs	https://doi.org/10.1364/JOSAA.5.001466
Publication status	Published - 1988

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title = "Calibration method for rotating-analyzer ellipsometers",

abstract = "In operating a rotating-analyzer ellipsometer one must know the plane of incidence accurately. We present a new calibration method, phase calibration, which is complementary to residue calibration Phase calibration is shown to be superior to the residue method for Δ < π/6 or Δ > 5π/6;.",

author = "{de Nijs}, J.M.M. and A.H.M. Holtslag and A. Hoekstra and {van Silfhout}, Arend",

year = "1988",

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AU - de Nijs, J.M.M.

AU - Holtslag, A.H.M.

AU - Hoekstra, A.

AU - van Silfhout, Arend

PY - 1988

Y1 - 1988

N2 - In operating a rotating-analyzer ellipsometer one must know the plane of incidence accurately. We present a new calibration method, phase calibration, which is complementary to residue calibration Phase calibration is shown to be superior to the residue method for Δ < π/6 or Δ > 5π/6;.

AB - In operating a rotating-analyzer ellipsometer one must know the plane of incidence accurately. We present a new calibration method, phase calibration, which is complementary to residue calibration Phase calibration is shown to be superior to the residue method for Δ < π/6 or Δ > 5π/6;.

U2 - 10.1364/JOSAA.5.001466

DO - 10.1364/JOSAA.5.001466

M3 - Article

VL - 5

SP - 1466

JO - Journal of the Optical Society of America

JF - Journal of the Optical Society of America

SN - 0030-3941

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