Cantilever deflection measurement and actuation by an nterdigitated transducer

Elia Strambini, V. Piazza, P. Pingue, G. Biasiol, L. Sorba, F. Beltram

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    A scheme that allows all-electrical high-bandwidth readout of a cantilever deflection by means of an integrated interdigitated transducer is presented. The present approach takes advantage of the piezoelectricity of the chosen cantilever substrate material to generate and detect surface-acoustic-waves by means of an interdigitated transducer IDT and to determine cantilever deflections. We shall also show that the same IDT can be used to excite the oscillation modes of the lever. Our scheme is compatible with implementations exploiting wireless excitation and readout and in mass sensing applications.
    Original languageUndefined
    Pages (from-to)173505
    Number of pages3
    JournalApplied physics letters
    Issue number17
    Publication statusPublished - 29 May 2010


    • EWI-19585
    • IR-75998
    • METIS-275933

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