Cantilever Deflection Read-out with a Grated Waveguide Optical Cavity

P.V.S. Pham Van So, L.J. Kauppinen, Mindert Dijkstra, Hendricus A.G.M. van Wolferen, R.M. de Ridder, Hugo Hoekstra

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    Abstract

    We propose a novel and highly sensitive mechano-optical device for gas-sensing through nano-displacements, based on micro-cantilevers, supplied with a selective gas absorbing layer (Pd), suspended above a Si3N4 grated waveguide (GWG). We present the simulation and preliminary experimental results, which indicate the sensing of nano-displacements, an important intermediate step for the gas-sensing purpose.
    Original languageUndefined
    Title of host publicationProceedings of the 15th European Conference on Integrated Optics, ECIO 2010
    Place of PublicationCambridge
    PublisherIEEE Photonics Society
    PagesThE6
    Number of pages2
    ISBN (Print)not assigned
    Publication statusPublished - 8 Apr 2010
    Event15th European Conference on Integrated Optics, ECIO 2010 - University of Cambridge, Cambridge, United Kingdom
    Duration: 7 Apr 20109 Apr 2010
    Conference number: 15

    Publication series

    Name
    PublisherIEEE Photonics Society

    Conference

    Conference15th European Conference on Integrated Optics, ECIO 2010
    Abbreviated titleECIO
    CountryUnited Kingdom
    CityCambridge
    Period7/04/109/04/10

    Keywords

    • METIS-276176
    • IR-75351
    • gas-sensing
    • EWI-18928
    • microcantilever
    • mechano-optical sensor
    • IOMS-SNS: SENSORS
    • Grated waveguide

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