Cantilever Deflection Read-out with a Grated Waveguide Optical Cavity

P.V.S. Pham Van So; L.J. Kauppinen; Mindert Dijkstra; Hendricus A.G.M. van Wolferen; R.M. de Ridder; Hugo Hoekstra

Cantilever Deflection Read-out with a Grated Waveguide Optical Cavity

P.V.S. Pham Van So, L.J. Kauppinen, Mindert Dijkstra, Hendricus A.G.M. van Wolferen, R.M. de Ridder, Hugo Hoekstra

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

We propose a novel and highly sensitive mechano-optical device for gas-sensing through nano-displacements, based on micro-cantilevers, supplied with a selective gas absorbing layer (Pd), suspended above a Si3N4 grated waveguide (GWG). We present the simulation and preliminary experimental results, which indicate the sensing of nano-displacements, an important intermediate step for the gas-sensing purpose.

Original language	Undefined
Title of host publication	Proceedings of the 15th European Conference on Integrated Optics, ECIO 2010
Place of Publication	Cambridge
Publisher	IEEE
Pages	ThE6
Number of pages	2
ISBN (Print)	not assigned
Publication status	Published - 8 Apr 2010
Event	15th European Conference on Integrated Optics, ECIO 2010 - University of Cambridge, Cambridge, United Kingdom Duration: 7 Apr 2010 → 9 Apr 2010 Conference number: 15

Publication series

Name
Publisher	IEEE Photonics Society

Conference

Conference	15th European Conference on Integrated Optics, ECIO 2010
Abbreviated title	ECIO
Country/Territory	United Kingdom
City	Cambridge
Period	7/04/10 → 9/04/10

Keywords

METIS-276176
IR-75351
gas-sensing
EWI-18928
microcantilever
mechano-optical sensor
IOMS-SNS: SENSORS
Grated waveguide

Access to Document

Cite this

@inproceedings{b05bc5a4a52b4850acfa8ca53dc7cdf8,

title = "Cantilever Deflection Read-out with a Grated Waveguide Optical Cavity",

abstract = "We propose a novel and highly sensitive mechano-optical device for gas-sensing through nano-displacements, based on micro-cantilevers, supplied with a selective gas absorbing layer (Pd), suspended above a Si3N4 grated waveguide (GWG). We present the simulation and preliminary experimental results, which indicate the sensing of nano-displacements, an important intermediate step for the gas-sensing purpose.",

keywords = "METIS-276176, IR-75351, gas-sensing, EWI-18928, microcantilever, mechano-optical sensor, IOMS-SNS: SENSORS, Grated waveguide",

author = "{Pham Van So}, P.V.S. and L.J. Kauppinen and Mindert Dijkstra and {van Wolferen}, {Hendricus A.G.M.} and {de Ridder}, R.M. and Hugo Hoekstra",

year = "2010",

month = apr,

day = "8",

language = "Undefined",

isbn = "not assigned",

publisher = "IEEE",

pages = "ThE6",

booktitle = "Proceedings of the 15th European Conference on Integrated Optics, ECIO 2010",

address = "United States",

note = "15th European Conference on Integrated Optics, ECIO 2010 ; Conference date: 07-04-2010 Through 09-04-2010",

}

Pham Van So, PVS, Kauppinen, LJ, Dijkstra, M, van Wolferen, HAGM, de Ridder, RM & Hoekstra, H 2010, Cantilever Deflection Read-out with a Grated Waveguide Optical Cavity. in Proceedings of the 15th European Conference on Integrated Optics, ECIO 2010. IEEE, Cambridge, pp. ThE6, 15th European Conference on Integrated Optics, ECIO 2010, Cambridge, United Kingdom, 7/04/10.

TY - GEN

T1 - Cantilever Deflection Read-out with a Grated Waveguide Optical Cavity

AU - Pham Van So, P.V.S.

AU - Kauppinen, L.J.

AU - Dijkstra, Mindert

AU - van Wolferen, Hendricus A.G.M.

AU - de Ridder, R.M.

AU - Hoekstra, Hugo

N1 - Conference code: 15

PY - 2010/4/8

Y1 - 2010/4/8

N2 - We propose a novel and highly sensitive mechano-optical device for gas-sensing through nano-displacements, based on micro-cantilevers, supplied with a selective gas absorbing layer (Pd), suspended above a Si3N4 grated waveguide (GWG). We present the simulation and preliminary experimental results, which indicate the sensing of nano-displacements, an important intermediate step for the gas-sensing purpose.

AB - We propose a novel and highly sensitive mechano-optical device for gas-sensing through nano-displacements, based on micro-cantilevers, supplied with a selective gas absorbing layer (Pd), suspended above a Si3N4 grated waveguide (GWG). We present the simulation and preliminary experimental results, which indicate the sensing of nano-displacements, an important intermediate step for the gas-sensing purpose.

KW - METIS-276176

KW - IR-75351

KW - gas-sensing

KW - EWI-18928

KW - microcantilever

KW - mechano-optical sensor

KW - IOMS-SNS: SENSORS

KW - Grated waveguide

M3 - Conference contribution

SN - not assigned

SP - ThE6

BT - Proceedings of the 15th European Conference on Integrated Optics, ECIO 2010

PB - IEEE

CY - Cambridge

T2 - 15th European Conference on Integrated Optics, ECIO 2010

Y2 - 7 April 2010 through 9 April 2010

ER -