Capacitance measurements for micromachined capacitive long-range position sensor

A.A. Kuijpers, Gijsbertus J.M. Krijnen, Remco J. Wiegerink, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of Safe/SeSens Conference 2003
Pages	-
Publication status	Published - 2003
Event	SAFE/SeSens 2003 - Veldhoven, the Netherlands Duration: 25 Nov 2003 → 26 Nov 2003

Keywords

@inproceedings{c1b1125f940e478db6d8ebb3454d7237,

title = "Capacitance measurements for micromachined capacitive long-range position sensor",

keywords = "METIS-215252, IR-46527",

author = "A.A. Kuijpers and Krijnen, {Gijsbertus J.M.} and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",

year = "2003",

language = "Undefined",

pages = "--",

booktitle = "Proceedings of Safe/SeSens Conference 2003",

note = "SAFE/SeSens 2003 ; Conference date: 25-11-2003 Through 26-11-2003",

}

TY - GEN

T1 - Capacitance measurements for micromachined capacitive long-range position sensor

AU - Kuijpers, A.A.

AU - Krijnen, Gijsbertus J.M.

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

PY - 2003

Y1 - 2003

KW - METIS-215252

KW - IR-46527

M3 - Conference contribution

SP - -

BT - Proceedings of Safe/SeSens Conference 2003

T2 - SAFE/SeSens 2003

Y2 - 25 November 2003 through 26 November 2003

ER -