Capacitive long-range position sensor for microactuators

A.A. Kuijpers, Remco J. Wiegerink, Gijsbertus J.M. Krijnen, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

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    18 Citations (Scopus)
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    Design, fabrication and measurements for a capacitive long-range position sensor for microactuators are presented. The sensor consists of two periodic geometries (period/spl ap/8-16 /spl mu/m) on resp. a slider and a sense-structure with minimal gap-distance of /spl sim/1 /spl mu/m. A relative displacement between the two results in a periodic change in capacitance. In open-loop operation the change in capacitance vs. slider displacement is measured using synchronous detection. Adjusting the minimal gap-distance with additional sense-actuators increases the capacitance. In closed-loop operation the position of the sense-structure is controlled to keep the sensor-capacitance at a larger constant value. Our results indicate that the position precision is increased to 18 nm in closed-loop operation compared to 70 nm in open-loop operation
    Original languageUndefined
    Title of host publicationMicro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
    Place of PublicationLos Alamitos
    Number of pages4
    ISBN (Print)0-7803-8265-x
    Publication statusPublished - 2004
    Event17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004 - Maastricht, Netherlands
    Duration: 25 Jan 200429 Jan 2004
    Conference number: 17

    Publication series

    NameMicro Electro Mechanical Systems
    PublisherIEEE Computer Society


    Conference17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004
    Abbreviated titleMEMS


    • EWI-10741
    • METIS-219750
    • IR-48359

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