Capacitive long-range position sensor for microactuators

A.A. Kuijpers; Remco J. Wiegerink; Gijsbertus J.M. Krijnen; Theodorus S.J. Lammerink; Michael Curt Elwenspoek

doi:10.1109/MEMS.2004.1290642

Capacitive long-range position sensor for microactuators

A.A. Kuijpers
, Remco J. Wiegerink
, Gijsbertus J.M. Krijnen
, Theodorus S.J. Lammerink
, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

19 Citations (Scopus)

252 Downloads (Pure)

Abstract

Design, fabrication and measurements for a capacitive long-range position sensor for microactuators are presented. The sensor consists of two periodic geometries (period/spl ap/8-16 /spl mu/m) on resp. a slider and a sense-structure with minimal gap-distance of /spl sim/1 /spl mu/m. A relative displacement between the two results in a periodic change in capacitance. In open-loop operation the change in capacitance vs. slider displacement is measured using synchronous detection. Adjusting the minimal gap-distance with additional sense-actuators increases the capacitance. In closed-loop operation the position of the sense-structure is controlled to keep the sensor-capacitance at a larger constant value. Our results indicate that the position precision is increased to 18 nm in closed-loop operation compared to 70 nm in open-loop operation

Original language	Undefined
Title of host publication	Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Place of Publication	Los Alamitos
Publisher	IEEE
Pages	544-547
Number of pages	4
ISBN (Print)	0-7803-8265-x
DOIs	https://doi.org/10.1109/MEMS.2004.1290642
Publication status	Published - 2004
Event	17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004 - Maastricht, Netherlands Duration: 25 Jan 2004 → 29 Jan 2004 Conference number: 17

Publication series

Name	Micro Electro Mechanical Systems
Publisher	IEEE Computer Society

Conference

Conference	17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004
Abbreviated title	MEMS
Country/Territory	Netherlands
City	Maastricht
Period	25/01/04 → 29/01/04

Keywords

EWI-10741
METIS-219750
IR-48359

Access to Document

10.1109/MEMS.2004.1290642

Cite this

@inproceedings{110b62e788ac44ad9e5a08eacbd941b4,

title = "Capacitive long-range position sensor for microactuators",

abstract = "Design, fabrication and measurements for a capacitive long-range position sensor for microactuators are presented. The sensor consists of two periodic geometries (period/spl ap/8-16 /spl mu/m) on resp. a slider and a sense-structure with minimal gap-distance of /spl sim/1 /spl mu/m. A relative displacement between the two results in a periodic change in capacitance. In open-loop operation the change in capacitance vs. slider displacement is measured using synchronous detection. Adjusting the minimal gap-distance with additional sense-actuators increases the capacitance. In closed-loop operation the position of the sense-structure is controlled to keep the sensor-capacitance at a larger constant value. Our results indicate that the position precision is increased to 18 nm in closed-loop operation compared to 70 nm in open-loop operation",

keywords = "EWI-10741, METIS-219750, IR-48359",

author = "A.A. Kuijpers and Wiegerink, \{Remco J.\} and Krijnen, \{Gijsbertus J.M.\} and Lammerink, \{Theodorus S.J.\} and Elwenspoek, \{Michael Curt\}",

year = "2004",

doi = "10.1109/MEMS.2004.1290642",

language = "Undefined",

isbn = "0-7803-8265-x",

series = "Micro Electro Mechanical Systems",

publisher = "IEEE",

pages = "544--547",

booktitle = "Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)",

address = "United States",

note = "17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004 ; Conference date: 25-01-2004 Through 29-01-2004",

}

Kuijpers, AA, Wiegerink, RJ , Krijnen, GJM, Lammerink, TSJ & Elwenspoek, MC 2004, Capacitive long-range position sensor for microactuators. in Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS). Micro Electro Mechanical Systems, IEEE, Los Alamitos, pp. 544-547, 17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004, Maastricht, Netherlands, 25/01/04. https://doi.org/10.1109/MEMS.2004.1290642

Capacitive long-range position sensor for microactuators. / Kuijpers, A.A.; Wiegerink, Remco J.; Krijnen, Gijsbertus J.M. et al.
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS). Los Alamitos: IEEE, 2004. p. 544-547 (Micro Electro Mechanical Systems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Capacitive long-range position sensor for microactuators

AU - Kuijpers, A.A.

AU - Wiegerink, Remco J.

AU - Krijnen, Gijsbertus J.M.

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 17

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Y1 - 2004

N2 - Design, fabrication and measurements for a capacitive long-range position sensor for microactuators are presented. The sensor consists of two periodic geometries (period/spl ap/8-16 /spl mu/m) on resp. a slider and a sense-structure with minimal gap-distance of /spl sim/1 /spl mu/m. A relative displacement between the two results in a periodic change in capacitance. In open-loop operation the change in capacitance vs. slider displacement is measured using synchronous detection. Adjusting the minimal gap-distance with additional sense-actuators increases the capacitance. In closed-loop operation the position of the sense-structure is controlled to keep the sensor-capacitance at a larger constant value. Our results indicate that the position precision is increased to 18 nm in closed-loop operation compared to 70 nm in open-loop operation

AB - Design, fabrication and measurements for a capacitive long-range position sensor for microactuators are presented. The sensor consists of two periodic geometries (period/spl ap/8-16 /spl mu/m) on resp. a slider and a sense-structure with minimal gap-distance of /spl sim/1 /spl mu/m. A relative displacement between the two results in a periodic change in capacitance. In open-loop operation the change in capacitance vs. slider displacement is measured using synchronous detection. Adjusting the minimal gap-distance with additional sense-actuators increases the capacitance. In closed-loop operation the position of the sense-structure is controlled to keep the sensor-capacitance at a larger constant value. Our results indicate that the position precision is increased to 18 nm in closed-loop operation compared to 70 nm in open-loop operation

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KW - METIS-219750

KW - IR-48359

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M3 - Conference contribution

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BT - Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

PB - IEEE

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