Capacitive MEMS application for high-frequency power sensor

A.M. Fernandes, J. Sesé, Jakob Flokstra, Remco J. Wiegerink

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of MME 2002 conference
Place of Publication	Sinaia, Romenia
Pages	209-212
Publication status	Published - 6 Oct 2002
Event	13th Micromechanics Europe Workshop, MME 2002 - Sinaia, Romania Duration: 6 Oct 2002 → 8 Oct 2002

Workshop	13th Micromechanics Europe Workshop, MME 2002
Abbreviated title	MME
Country/Territory	Romania
City	Sinaia
Period	6/10/02 → 8/10/02

Keywords

@inproceedings{86925abd1aa3420b92e5ce1a2350a448,

title = "Capacitive MEMS application for high-frequency power sensor",

keywords = "METIS-207749",

author = "A.M. Fernandes and J. Ses{\'e} and Jakob Flokstra and Wiegerink, {Remco J.}",

year = "2002",

month = oct,

day = "6",

language = "Undefined",

isbn = "973-0-02472-3",

pages = "209--212",

booktitle = "Proceedings of MME 2002 conference",

note = "13th Micromechanics Europe Workshop, MME 2002 ; Conference date: 06-10-2002 Through 08-10-2002",

}

TY - GEN

T1 - Capacitive MEMS application for high-frequency power sensor

AU - Fernandes, A.M.

AU - Sesé, J.

AU - Flokstra, Jakob

AU - Wiegerink, Remco J.

PY - 2002/10/6

Y1 - 2002/10/6

KW - METIS-207749

M3 - Conference contribution

SN - 973-0-02472-3

SP - 209

EP - 212

BT - Proceedings of MME 2002 conference

CY - Sinaia, Romenia

T2 - 13th Micromechanics Europe Workshop, MME 2002

Y2 - 6 October 2002 through 8 October 2002

ER -