Capacitive MEMS application for high-frequency power sensor

A.M. Fernandes, J. Sesé, Jakob Flokstra, Remco J. Wiegerink

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of MME 2002 conference
    Place of PublicationSinaia, Romenia
    Pages209-212
    Publication statusPublished - 6 Oct 2002
    Event13th Micromechanics Europe Workshop, MME 2002 - Sinaia, Romania
    Duration: 6 Oct 20028 Oct 2002

    Workshop

    Workshop13th Micromechanics Europe Workshop, MME 2002
    Abbreviated titleMME
    CountryRomania
    CitySinaia
    Period6/10/028/10/02

    Keywords

    • METIS-207749

    Cite this

    Fernandes, A. M., Sesé, J., Flokstra, J., & Wiegerink, R. J. (2002). Capacitive MEMS application for high-frequency power sensor. In Proceedings of MME 2002 conference (pp. 209-212). Sinaia, Romenia.
    Fernandes, A.M. ; Sesé, J. ; Flokstra, Jakob ; Wiegerink, Remco J. / Capacitive MEMS application for high-frequency power sensor. Proceedings of MME 2002 conference. Sinaia, Romenia, 2002. pp. 209-212
    @inproceedings{86925abd1aa3420b92e5ce1a2350a448,
    title = "Capacitive MEMS application for high-frequency power sensor",
    keywords = "METIS-207749",
    author = "A.M. Fernandes and J. Ses{\'e} and Jakob Flokstra and Wiegerink, {Remco J.}",
    year = "2002",
    month = "10",
    day = "6",
    language = "Undefined",
    isbn = "973-0-02472-3",
    pages = "209--212",
    booktitle = "Proceedings of MME 2002 conference",

    }

    Fernandes, AM, Sesé, J, Flokstra, J & Wiegerink, RJ 2002, Capacitive MEMS application for high-frequency power sensor. in Proceedings of MME 2002 conference. Sinaia, Romenia, pp. 209-212, 13th Micromechanics Europe Workshop, MME 2002, Sinaia, Romania, 6/10/02.

    Capacitive MEMS application for high-frequency power sensor. / Fernandes, A.M.; Sesé, J.; Flokstra, Jakob; Wiegerink, Remco J.

    Proceedings of MME 2002 conference. Sinaia, Romenia, 2002. p. 209-212.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Capacitive MEMS application for high-frequency power sensor

    AU - Fernandes, A.M.

    AU - Sesé, J.

    AU - Flokstra, Jakob

    AU - Wiegerink, Remco J.

    PY - 2002/10/6

    Y1 - 2002/10/6

    KW - METIS-207749

    M3 - Conference contribution

    SN - 973-0-02472-3

    SP - 209

    EP - 212

    BT - Proceedings of MME 2002 conference

    CY - Sinaia, Romenia

    ER -

    Fernandes AM, Sesé J, Flokstra J, Wiegerink RJ. Capacitive MEMS application for high-frequency power sensor. In Proceedings of MME 2002 conference. Sinaia, Romenia. 2002. p. 209-212