Capacitive MEMS application for high-frequency power sensor

A.M. Fernandes, J. Sesé, Jakob Flokstra, Remco J. Wiegerink

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of MME 2002 conference
    Place of PublicationSinaia, Romenia
    Pages209-212
    Publication statusPublished - 6 Oct 2002
    Event13th Micromechanics Europe Workshop, MME 2002 - Sinaia, Romania
    Duration: 6 Oct 20028 Oct 2002

    Workshop

    Workshop13th Micromechanics Europe Workshop, MME 2002
    Abbreviated titleMME
    CountryRomania
    CitySinaia
    Period6/10/028/10/02

    Keywords

    • METIS-207749

    Cite this

    Fernandes, A. M., Sesé, J., Flokstra, J., & Wiegerink, R. J. (2002). Capacitive MEMS application for high-frequency power sensor. In Proceedings of MME 2002 conference (pp. 209-212). Sinaia, Romenia.