Capacitive rf power sensor based on MEMS technology

L.J. Fernandez, E. Visser, J. Sesé, Remco J. Wiegerink, H. Jansen, Jakob Flokstra, Michael Curt Elwenspoek

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 2 Jul 2003
Event	MEMSWAVE - Toulouse, France Duration: 2 Jul 2003 → 4 Jul 2003

Keywords

@conference{64e7daf9e7d64e93b459cb957587319d,

title = "Capacitive rf power sensor based on MEMS technology",

keywords = "METIS-214464",

author = "L.J. Fernandez and E. Visser and J. Ses{\'e} and Wiegerink, {Remco J.} and H. Jansen and Jakob Flokstra and Elwenspoek, {Michael Curt}",

year = "2003",

month = jul,

day = "2",

language = "Undefined",

pages = "--",

note = "MEMSWAVE ; Conference date: 02-07-2003 Through 04-07-2003",

}