Capacitive rf power sensor based on MEMS technology

L.J. Fernandez, E. Visser, J. Sesé, Remco J. Wiegerink, H. Jansen, Jakob Flokstra, Michael Curt Elwenspoek

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 2 Jul 2003
    EventMEMSWAVE - Toulouse, France
    Duration: 2 Jul 20034 Jul 2003

    Conference

    ConferenceMEMSWAVE
    CityToulouse, France
    Period2/07/034/07/03

    Keywords

    • METIS-214464

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