Capacitively transduced polycrystalline GeSi MEM resonators

Wireless communication technology has revolutionized our daily life through rapid development in the areas of broadcasting, wireless local area networks (WLAN), wireless sensor networks, mobile communication, and satellite communication etc. [1.01]. Wireless communication systems rely on their ability to select or generate signals with a very precise frequency. Filters are used for the reception of a desired signal in an overly crowded frequency spectrum, in the presence of a substantial amount of interference. In the same systems, oscillators are required for a stable reference frequency. The common feature of filters and oscillators is their use of resonators, of which performance is extremely important, especially in the case of low-noise or low-power designs [1.02].