Capillarity effect in silicon based nanochannels

Niels Roelof Tas, J. Haneveld, Henricus V. Jansen, N. Brunets, J.W. van Honschoten

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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    Abstract

    Using silicon based micromachining we have developed different techniques to create 1D and 2D confined nanochannels, with a characteristic diameter down to 5 nm. A short introduction to these techniques will be given. Capillary action in channels of
    Original languageUndefined
    Title of host publicationProceedings Second International Workshop on Nanotechnology and Application, IWNA 2009
    Place of PublicationVung Tau, Vietnam
    PublisherIWNA 2009 International Conference
    Pages1-1
    Number of pages1
    ISBN (Print)not assigned
    Publication statusPublished - 12 Nov 2009

    Publication series

    Name
    PublisherIWNA 2009 International Conference

    Keywords

    • METIS-276411
    • IR-76540
    • EWI-19921

    Cite this

    Tas, N. R., Haneveld, J., Jansen, H. V., Brunets, N., & van Honschoten, J. W. (2009). Capillarity effect in silicon based nanochannels. In Proceedings Second International Workshop on Nanotechnology and Application, IWNA 2009 (pp. 1-1). Vung Tau, Vietnam: IWNA 2009 International Conference.
    Tas, Niels Roelof ; Haneveld, J. ; Jansen, Henricus V. ; Brunets, N. ; van Honschoten, J.W. / Capillarity effect in silicon based nanochannels. Proceedings Second International Workshop on Nanotechnology and Application, IWNA 2009. Vung Tau, Vietnam : IWNA 2009 International Conference, 2009. pp. 1-1
    @inproceedings{a86a513d2b784984a30534faf8dc61a1,
    title = "Capillarity effect in silicon based nanochannels",
    abstract = "Using silicon based micromachining we have developed different techniques to create 1D and 2D confined nanochannels, with a characteristic diameter down to 5 nm. A short introduction to these techniques will be given. Capillary action in channels of",
    keywords = "METIS-276411, IR-76540, EWI-19921",
    author = "Tas, {Niels Roelof} and J. Haneveld and Jansen, {Henricus V.} and N. Brunets and {van Honschoten}, J.W.",
    year = "2009",
    month = "11",
    day = "12",
    language = "Undefined",
    isbn = "not assigned",
    publisher = "IWNA 2009 International Conference",
    pages = "1--1",
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    Tas, NR, Haneveld, J, Jansen, HV, Brunets, N & van Honschoten, JW 2009, Capillarity effect in silicon based nanochannels. in Proceedings Second International Workshop on Nanotechnology and Application, IWNA 2009. IWNA 2009 International Conference, Vung Tau, Vietnam, pp. 1-1.

    Capillarity effect in silicon based nanochannels. / Tas, Niels Roelof; Haneveld, J.; Jansen, Henricus V.; Brunets, N.; van Honschoten, J.W.

    Proceedings Second International Workshop on Nanotechnology and Application, IWNA 2009. Vung Tau, Vietnam : IWNA 2009 International Conference, 2009. p. 1-1.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    TY - GEN

    T1 - Capillarity effect in silicon based nanochannels

    AU - Tas, Niels Roelof

    AU - Haneveld, J.

    AU - Jansen, Henricus V.

    AU - Brunets, N.

    AU - van Honschoten, J.W.

    PY - 2009/11/12

    Y1 - 2009/11/12

    N2 - Using silicon based micromachining we have developed different techniques to create 1D and 2D confined nanochannels, with a characteristic diameter down to 5 nm. A short introduction to these techniques will be given. Capillary action in channels of

    AB - Using silicon based micromachining we have developed different techniques to create 1D and 2D confined nanochannels, with a characteristic diameter down to 5 nm. A short introduction to these techniques will be given. Capillary action in channels of

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    KW - IR-76540

    KW - EWI-19921

    M3 - Conference contribution

    SN - not assigned

    SP - 1

    EP - 1

    BT - Proceedings Second International Workshop on Nanotechnology and Application, IWNA 2009

    PB - IWNA 2009 International Conference

    CY - Vung Tau, Vietnam

    ER -

    Tas NR, Haneveld J, Jansen HV, Brunets N, van Honschoten JW. Capillarity effect in silicon based nanochannels. In Proceedings Second International Workshop on Nanotechnology and Application, IWNA 2009. Vung Tau, Vietnam: IWNA 2009 International Conference. 2009. p. 1-1