Capillarity effect in silicon based nanochannels

Niels Roelof Tas, J. Haneveld, Henricus V. Jansen, N. Brunets, J.W. van Honschoten

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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    Abstract

    Using silicon based micromachining we have developed different techniques to create 1D and 2D confined nanochannels, with a characteristic diameter down to 5 nm. A short introduction to these techniques will be given. Capillary action in channels of
    Original languageUndefined
    Title of host publicationProceedings Second International Workshop on Nanotechnology and Application, IWNA 2009
    Place of PublicationVung Tau, Vietnam
    PublisherIWNA 2009 International Conference
    Pages1-1
    Number of pages1
    ISBN (Print)not assigned
    Publication statusPublished - 12 Nov 2009
    Event2nd International Workshop on Nanotechnology and Application, IWNA 2009 - Vung Tau, Viet Nam
    Duration: 12 Nov 200914 Nov 2009
    Conference number: 2

    Publication series

    Name
    PublisherIWNA 2009 International Conference

    Conference

    Conference2nd International Workshop on Nanotechnology and Application, IWNA 2009
    Abbreviated titleIWNA 2009
    CountryViet Nam
    CityVung Tau
    Period12/11/0914/11/09

    Keywords

    • METIS-276411
    • IR-76540
    • EWI-19921

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