Capillarity effect in silicon based nanochannels

Niels Roelof Tas; J. Haneveld; Henricus V. Jansen; N. Brunets; J.W. van Honschoten

Capillarity effect in silicon based nanochannels

Niels Roelof Tas, J. Haneveld, Henricus V. Jansen, N. Brunets, J.W. van Honschoten

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

Using silicon based micromachining we have developed different techniques to create 1D and 2D confined nanochannels, with a characteristic diameter down to 5 nm. A short introduction to these techniques will be given. Capillary action in channels of

Original language	Undefined
Title of host publication	Proceedings Second International Workshop on Nanotechnology and Application, IWNA 2009
Place of Publication	Vung Tau, Vietnam
Pages	1-1
Number of pages	1
Publication status	Published - 12 Nov 2009
Event	2nd International Workshop on Nanotechnology and Application, IWNA 2009 - Vung Tau, Viet Nam Duration: 12 Nov 2009 → 14 Nov 2009 Conference number: 2

Publication series

Name
Publisher	IWNA 2009 International Conference

Conference

Conference	2nd International Workshop on Nanotechnology and Application, IWNA 2009
Abbreviated title	IWNA 2009
Country/Territory	Viet Nam
City	Vung Tau
Period	12/11/09 → 14/11/09

Keywords

METIS-276411
IR-76540
EWI-19921

Access to Document

Cite this

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title = "Capillarity effect in silicon based nanochannels",

abstract = "Using silicon based micromachining we have developed different techniques to create 1D and 2D confined nanochannels, with a characteristic diameter down to 5 nm. A short introduction to these techniques will be given. Capillary action in channels of",

keywords = "METIS-276411, IR-76540, EWI-19921",

author = "Tas, {Niels Roelof} and J. Haneveld and Jansen, {Henricus V.} and N. Brunets and {van Honschoten}, J.W.",

year = "2009",

month = nov,

day = "12",

language = "Undefined",

publisher = "IWNA 2009 International Conference",

pages = "1--1",

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note = "2nd International Workshop on Nanotechnology and Application, IWNA 2009 ; Conference date: 12-11-2009 Through 14-11-2009",

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T1 - Capillarity effect in silicon based nanochannels

AU - Tas, Niels Roelof

AU - Haneveld, J.

AU - Jansen, Henricus V.

AU - Brunets, N.

AU - van Honschoten, J.W.

N1 - Conference code: 2

PY - 2009/11/12

Y1 - 2009/11/12

N2 - Using silicon based micromachining we have developed different techniques to create 1D and 2D confined nanochannels, with a characteristic diameter down to 5 nm. A short introduction to these techniques will be given. Capillary action in channels of

AB - Using silicon based micromachining we have developed different techniques to create 1D and 2D confined nanochannels, with a characteristic diameter down to 5 nm. A short introduction to these techniques will be given. Capillary action in channels of

KW - METIS-276411

KW - IR-76540

KW - EWI-19921

M3 - Conference contribution

SP - 1

EP - 1

BT - Proceedings Second International Workshop on Nanotechnology and Application, IWNA 2009

CY - Vung Tau, Vietnam

T2 - 2nd International Workshop on Nanotechnology and Application, IWNA 2009

Y2 - 12 November 2009 through 14 November 2009

ER -