TY - JOUR
T1 - Carving fiber-top optomechanical transducers from an optical fiber
AU - Deladi, S.
AU - Iannuzzi, D.
AU - Gadgil, V.J.
AU - Schreuders, H.
AU - Elwenspoek, M.C.
PY - 2006/3/24
Y1 - 2006/3/24
N2 - In a recent paper (Iannuzzi et al 2006 Monolithic fiber-top sensor for critical environments and standard applications Appl. Phys. Lett. 88 053501) we have presented the principle of the fiber-top position sensor, having a monolytical structure carved out of a single-mode optical fiber. The device alleviates sensing in a critical environment via interferometric readout, and
because of its monolithic construction, facilitates plug-and-play utilization without alignment. In this paper we describe the fabrication method of a similar device which, however, was also equipped with a pyramidal tip on
the top of the cantilever, an important detail for future implementation in scanning probe microscopy. A silicon surface was then periodically put in contact and moved out of contact with the device. The output signal
resembles force curves that can be similarly obtained with atomic force microscopes.
AB - In a recent paper (Iannuzzi et al 2006 Monolithic fiber-top sensor for critical environments and standard applications Appl. Phys. Lett. 88 053501) we have presented the principle of the fiber-top position sensor, having a monolytical structure carved out of a single-mode optical fiber. The device alleviates sensing in a critical environment via interferometric readout, and
because of its monolithic construction, facilitates plug-and-play utilization without alignment. In this paper we describe the fabrication method of a similar device which, however, was also equipped with a pyramidal tip on
the top of the cantilever, an important detail for future implementation in scanning probe microscopy. A silicon surface was then periodically put in contact and moved out of contact with the device. The output signal
resembles force curves that can be similarly obtained with atomic force microscopes.
U2 - 10.1088/0960-1317/16/5/002
DO - 10.1088/0960-1317/16/5/002
M3 - Article
VL - 16
SP - 886
EP - 889
JO - Journal of micromechanics and microengineering
JF - Journal of micromechanics and microengineering
SN - 0960-1317
IS - 5
ER -