By means of electrochemical vapor deposition (EVD), it is possible to grow thin, dense layers of zirconia/yttria/terbiasolid solution (ZYT) on porous ceramic substrates. These layers can be used as ceramic membranes for oxygen separation. The kinetics of the EVD process, the morphology of the grown layers and their oxygen permeation properties are investigated. At a deposition temperature of 800°C, the EVD layer growth is limited by bulk electrochemical transport. At 1000°Cthe layer growth is limited by pore diffusion of the oxygen source reactant. The EVD-grown ZYT layers show columnarstructures with prismatic grains on top; the size of the grains (1 to 2 µm) increases slightly with temperature and depositiontime. ZYT is deposited mainly in the cubic doped zirconia phase. Oxygen permeation experiments show that the oxygenpermeation flux through the ZYT layers is limited by an electrochemical process. Permeation values in the order of10–8 mol/cm2 s have been observed (900–1000°C, air vs. CO/CO2).