@inbook{ca67f1279ddc4627ba367939875f6d8a,
title = "Channeling and backscatter imaging",
abstract = "While the default imaging mode in HIM uses secondary electrons, backscattered helium or neon contains valuable information about the sample composition and structure. In this chapter, we will discuss how backscattered helium can be used to obtain information about buried structures and provide qualitative elemental contrast. The discussion is extended to the use of channeling to increase image quality and obtain crystallographic information. As an example, we demonstrate that the period of a dislocation network in a film only two monolayers thick can be obtained with atomic precision.",
author = "Gregor Hlawacek and Vasilisa Veligura and {Van Gastel}, Raoul and Bene Poelsema",
year = "2016",
month = jan,
day = "1",
doi = "10.1007/978-3-319-41990-9_9",
language = "English",
isbn = "978-3-319-41988-6",
series = "NanoScience and Technology",
publisher = "Springer",
pages = "205--224",
editor = "Gregor Hlawacek and Armin G{\"o}lzh{\"a}user",
booktitle = "Helium Ion Microscopy",
address = "Netherlands",
}