Channeling and backscatter imaging

Gregor Hlawacek*, Vasilisa Veligura, Raoul Van Gastel, Bene Poelsema

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingChapterAcademicpeer-review

1 Citation (Scopus)


While the default imaging mode in HIM uses secondary electrons, backscattered helium or neon contains valuable information about the sample composition and structure. In this chapter, we will discuss how backscattered helium can be used to obtain information about buried structures and provide qualitative elemental contrast. The discussion is extended to the use of channeling to increase image quality and obtain crystallographic information. As an example, we demonstrate that the period of a dislocation network in a film only two monolayers thick can be obtained with atomic precision.

Original languageEnglish
Title of host publicationHelium Ion Microscopy
EditorsGregor Hlawacek, Armin Gölzhäuser
Place of PublicationBasel
Number of pages20
ISBN (Electronic)978-3-319-41990-9
ISBN (Print)978-3-319-41988-6
Publication statusPublished - 1 Jan 2016

Publication series

NameNanoScience and Technology
ISSN (Print)1434-4904


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