Channeling and backscatter imaging

Gregor Hlawacek; Vasilisa Veligura; Raoul Van Gastel; Bene Poelsema

doi:10.1007/978-3-319-41990-9_9

Channeling and backscatter imaging

Gregor Hlawacek^*, Vasilisa Veligura, Raoul Van Gastel, Bene Poelsema

^*Corresponding author for this work

Physics of Interfaces and Nanomaterials

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic › peer-review

1 Citation (Scopus)

Abstract

While the default imaging mode in HIM uses secondary electrons, backscattered helium or neon contains valuable information about the sample composition and structure. In this chapter, we will discuss how backscattered helium can be used to obtain information about buried structures and provide qualitative elemental contrast. The discussion is extended to the use of channeling to increase image quality and obtain crystallographic information. As an example, we demonstrate that the period of a dislocation network in a film only two monolayers thick can be obtained with atomic precision.

Original language	English
Title of host publication	Helium Ion Microscopy
Editors	Gregor Hlawacek, Armin Gölzhäuser
Place of Publication	Basel
Publisher	Springer
Pages	205-224
Number of pages	20
ISBN (Electronic)	978-3-319-41990-9
ISBN (Print)	978-3-319-41988-6
DOIs	https://doi.org/10.1007/978-3-319-41990-9_9
Publication status	Published - 1 Jan 2016

Publication series

Name	NanoScience and Technology
Publisher	Springer
ISSN (Print)	1434-4904

Access to Document

10.1007/978-3-319-41990-9_9

Link to publication in Scopus

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