Channeling and backscatter imaging

Gregor Hlawacek, Vasilisa Veligura, Raoul Van Gastel, Bene Poelsema

Research output: Chapter in Book/Report/Conference proceedingChapterAcademicpeer-review

Abstract

While the default imaging mode in HIM uses secondary electrons, backscattered helium or neon contains valuable information about the sample composition and structure. In this chapter, we will discuss how backscattered helium can be used to obtain information about buried structures and provide qualitative elemental contrast. The discussion is extended to the use of channeling to increase image quality and obtain crystallographic information. As an example, we demonstrate that the period of a dislocation network in a film only two monolayers thick can be obtained with atomic precision.

Original languageEnglish
Title of host publicationHelium Ion Microscopy
EditorsGregor Hlawacek, Armin Gölzhäuser
Place of PublicationBasel
PublisherSpringer
Pages205-224
Number of pages20
ISBN (Electronic)978-3-319-41990-9
ISBN (Print)978-3-319-41988-6
DOIs
Publication statusPublished - 1 Jan 2016

Publication series

NameNanoScience and Technology
PublisherSpringer
ISSN (Print)1434-4904

Fingerprint

Helium
Neon
Imaging techniques
helium
Image quality
Monolayers
neon
Electrons
Chemical analysis
electrons

Cite this

Hlawacek, G., Veligura, V., Van Gastel, R., & Poelsema, B. (2016). Channeling and backscatter imaging. In G. Hlawacek, & A. Gölzhäuser (Eds.), Helium Ion Microscopy (pp. 205-224). (NanoScience and Technology). Basel: Springer. https://doi.org/10.1007/978-3-319-41990-9_9
Hlawacek, Gregor ; Veligura, Vasilisa ; Van Gastel, Raoul ; Poelsema, Bene. / Channeling and backscatter imaging. Helium Ion Microscopy. editor / Gregor Hlawacek ; Armin Gölzhäuser. Basel : Springer, 2016. pp. 205-224 (NanoScience and Technology).
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Hlawacek, G, Veligura, V, Van Gastel, R & Poelsema, B 2016, Channeling and backscatter imaging. in G Hlawacek & A Gölzhäuser (eds), Helium Ion Microscopy. NanoScience and Technology, Springer, Basel, pp. 205-224. https://doi.org/10.1007/978-3-319-41990-9_9

Channeling and backscatter imaging. / Hlawacek, Gregor; Veligura, Vasilisa; Van Gastel, Raoul; Poelsema, Bene.

Helium Ion Microscopy. ed. / Gregor Hlawacek; Armin Gölzhäuser. Basel : Springer, 2016. p. 205-224 (NanoScience and Technology).

Research output: Chapter in Book/Report/Conference proceedingChapterAcademicpeer-review

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Hlawacek G, Veligura V, Van Gastel R, Poelsema B. Channeling and backscatter imaging. In Hlawacek G, Gölzhäuser A, editors, Helium Ion Microscopy. Basel: Springer. 2016. p. 205-224. (NanoScience and Technology). https://doi.org/10.1007/978-3-319-41990-9_9