Abstract
While the default imaging mode in HIM uses secondary electrons, backscattered helium or neon contains valuable information about the sample composition and structure. In this chapter, we will discuss how backscattered helium can be used to obtain information about buried structures and provide qualitative elemental contrast. The discussion is extended to the use of channeling to increase image quality and obtain crystallographic information. As an example, we demonstrate that the period of a dislocation network in a film only two monolayers thick can be obtained with atomic precision.
| Original language | English |
|---|---|
| Title of host publication | Helium Ion Microscopy |
| Editors | Gregor Hlawacek, Armin Gölzhäuser |
| Place of Publication | Basel |
| Publisher | Springer |
| Pages | 205-224 |
| Number of pages | 20 |
| ISBN (Electronic) | 978-3-319-41990-9 |
| ISBN (Print) | 978-3-319-41988-6 |
| DOIs | |
| Publication status | Published - 1 Jan 2016 |
Publication series
| Name | NanoScience and Technology |
|---|---|
| Publisher | Springer |
| ISSN (Print) | 1434-4904 |
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Channeling and backscatter imaging. / Hlawacek, Gregor; Veligura, Vasilisa; Van Gastel, Raoul; Poelsema, Bene.
Helium Ion Microscopy. ed. / Gregor Hlawacek; Armin Gölzhäuser. Basel : Springer, 2016. p. 205-224 (NanoScience and Technology).Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic › peer-review
TY - CHAP
T1 - Channeling and backscatter imaging
AU - Hlawacek, Gregor
AU - Veligura, Vasilisa
AU - Van Gastel, Raoul
AU - Poelsema, Bene
PY - 2016/1/1
Y1 - 2016/1/1
N2 - While the default imaging mode in HIM uses secondary electrons, backscattered helium or neon contains valuable information about the sample composition and structure. In this chapter, we will discuss how backscattered helium can be used to obtain information about buried structures and provide qualitative elemental contrast. The discussion is extended to the use of channeling to increase image quality and obtain crystallographic information. As an example, we demonstrate that the period of a dislocation network in a film only two monolayers thick can be obtained with atomic precision.
AB - While the default imaging mode in HIM uses secondary electrons, backscattered helium or neon contains valuable information about the sample composition and structure. In this chapter, we will discuss how backscattered helium can be used to obtain information about buried structures and provide qualitative elemental contrast. The discussion is extended to the use of channeling to increase image quality and obtain crystallographic information. As an example, we demonstrate that the period of a dislocation network in a film only two monolayers thick can be obtained with atomic precision.
UR - http://www.scopus.com/inward/record.url?scp=85007470567&partnerID=8YFLogxK
U2 - 10.1007/978-3-319-41990-9_9
DO - 10.1007/978-3-319-41990-9_9
M3 - Chapter
SN - 978-3-319-41988-6
T3 - NanoScience and Technology
SP - 205
EP - 224
BT - Helium Ion Microscopy
A2 - Hlawacek, Gregor
A2 - Gölzhäuser, Armin
PB - Springer
CY - Basel
ER -