Channeling effect in Helium Ion Microscopy

V. Veligura, Raoul van Gastel, G. Hlawacek, Henricus J.W. Zandvliet, Bene Poelsema

Research output: Contribution to conferencePoster

Original languageEnglish
Pages-
Publication statusPublished - 25 Jul 2011

Keywords

  • METIS-282342

Cite this

Veligura, V., van Gastel, R., Hlawacek, G., Zandvliet, H. J. W., & Poelsema, B. (2011). Channeling effect in Helium Ion Microscopy. -.