Characterisation of a highly symmetrical miniature capacitive triaxial accelerometer

Joost Conrad Lotters, Joost Conrad Lötters, Wouter Olthuis, Petrus H. Veltink, Piet Bergveld

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    A highly symmetrical cubic capacitive triaxial accelerometer for biomedical applications has been designed, realised and tested. The sensors are available in two outer dimensions, namely 2×2×2 and 5×5×5 mm3. The devices are mounted on a standard IC package for easy testing. Features of the sensor are a highly symmetrical cubic structure, capacitive coupling of the high frequency input voltage to the seismic mass and the use of the polymers polydimethylsiloxane (PDMS) as spring material between the capacitor plates and the mass and polyimide (PI) as flexible interconnection layer between the capacitor plates. The sensor structure and its basic operating principle, its mathematical mass-spring-damper model and the necessary cleanroom technology are described. The measurement results show a sensitivity of ~0.15 V/(m/s2) with a corresponding resolution of 0.01 m/s2, an off-axis sensitivity of <5 %, a good linearity in the output voltage for accelerations up to at least 50 m/s2 and a bandwidth of DC 500 Hz
    Original languageUndefined
    Title of host publicationTransducers '97
    Place of PublicationChicago, USA
    Publication statusPublished - 19 Jun 1997
    Event1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997 - Chicago, United States
    Duration: 16 Jun 199719 Jun 1997


    Conference1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997
    Abbreviated titleTRANSDUCERS 97
    CountryUnited States


    • IR-16881
    • METIS-113766

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