Characterisation of Capacitive MEMS at Cryogenic Temperatures

M.C. van Essen, L.J. Fernandez, J.M. Reitsema, Remco J. Wiegerink, J. Sesé, Jakob Flokstra

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Original languageEnglish
    Title of host publicationProceedings 6th European Workshop on Low Temperature Electronics, WOLTE-6
    Subtitle of host publication23-25 June, 2004, ESTEC, Noordwijk, The Netherlands
    Place of PublicationNoordwijk
    PublisherESA
    Pages137-143
    Number of pages7
    Publication statusPublished - 2004
    Event6th European Workshop on Low Temperature Electronics, WOLTE 2004 - Noordwijk, Netherlands
    Duration: 23 Jun 200425 Jun 2004
    Conference number: 6

    Workshop

    Workshop6th European Workshop on Low Temperature Electronics, WOLTE 2004
    Abbreviated titleWOLTE-6
    CountryNetherlands
    CityNoordwijk
    Period23/06/0425/06/04

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