Characterisation of capacitive MEMs at cryogenic temperatures

M.C. van Essen, J. Sesé, L.J. Fernandez, J.M. Reitsema, Remco J. Wiegerink, Jakob Flokstra

    Research output: Contribution to conferencePosterOther research output

    Original languageEnglish
    Publication statusPublished - 30 Sep 2004
    EventMESA+ Day 2004 - Cinestar, Enschede, Netherlands
    Duration: 30 Sep 200430 Sep 2004

    Conference

    ConferenceMESA+ Day 2004
    CountryNetherlands
    CityEnschede
    Period30/09/0430/09/04
    Other(MESA+ Dag/Meeting)

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