Characterisation of capacitive MEMs at cryogenic temperatures

M.C. van Essen, J. Sesé, L.J. Fernandez, J.M. Reitsema, Remco J. Wiegerink, Jakob Flokstra

    Research output: Contribution to conferencePoster

    Original languageEnglish
    Publication statusPublished - 30 Sep 2004
    EventMESA+ Day 2004 - Cinestar, Enschede, Netherlands
    Duration: 30 Sep 200430 Sep 2004

    Conference

    ConferenceMESA+ Day 2004
    CountryNetherlands
    CityEnschede
    Period30/09/0430/09/04
    Other(MESA+ Dag/Meeting)

    Cite this

    van Essen, M. C., Sesé, J., Fernandez, L. J., Reitsema, J. M., Wiegerink, R. J., & Flokstra, J. (2004). Characterisation of capacitive MEMs at cryogenic temperatures. Poster session presented at MESA+ Day 2004, Enschede, Netherlands.
    van Essen, M.C. ; Sesé, J. ; Fernandez, L.J. ; Reitsema, J.M. ; Wiegerink, Remco J. ; Flokstra, Jakob. / Characterisation of capacitive MEMs at cryogenic temperatures. Poster session presented at MESA+ Day 2004, Enschede, Netherlands.
    @conference{340cdf33c3d748d6bf0b69d9aebb09b5,
    title = "Characterisation of capacitive MEMs at cryogenic temperatures",
    author = "{van Essen}, M.C. and J. Ses{\'e} and L.J. Fernandez and J.M. Reitsema and Wiegerink, {Remco J.} and Jakob Flokstra",
    year = "2004",
    month = "9",
    day = "30",
    language = "English",
    note = "MESA+ Day 2004 ; Conference date: 30-09-2004 Through 30-09-2004",

    }

    van Essen, MC, Sesé, J, Fernandez, LJ, Reitsema, JM, Wiegerink, RJ & Flokstra, J 2004, 'Characterisation of capacitive MEMs at cryogenic temperatures' MESA+ Day 2004, Enschede, Netherlands, 30/09/04 - 30/09/04, .

    Characterisation of capacitive MEMs at cryogenic temperatures. / van Essen, M.C.; Sesé, J.; Fernandez, L.J.; Reitsema, J.M.; Wiegerink, Remco J.; Flokstra, Jakob.

    2004. Poster session presented at MESA+ Day 2004, Enschede, Netherlands.

    Research output: Contribution to conferencePoster

    TY - CONF

    T1 - Characterisation of capacitive MEMs at cryogenic temperatures

    AU - van Essen, M.C.

    AU - Sesé, J.

    AU - Fernandez, L.J.

    AU - Reitsema, J.M.

    AU - Wiegerink, Remco J.

    AU - Flokstra, Jakob

    PY - 2004/9/30

    Y1 - 2004/9/30

    M3 - Poster

    ER -

    van Essen MC, Sesé J, Fernandez LJ, Reitsema JM, Wiegerink RJ, Flokstra J. Characterisation of capacitive MEMs at cryogenic temperatures. 2004. Poster session presented at MESA+ Day 2004, Enschede, Netherlands.