Characterisation of capacitive MEMs at cryogenic temperatures

M.C. van Essen, J. Sesé, L.J. Fernandez, J.M. Reitsema, Remco J. Wiegerink, Jakob Flokstra

    Research output: Contribution to conferencePoster

    Original languageEnglish
    Publication statusPublished - 30 Sep 2004
    EventMESA+ Day 2004 - Cinestar, Enschede, Netherlands
    Duration: 30 Sep 200430 Sep 2004

    Conference

    ConferenceMESA+ Day 2004
    CountryNetherlands
    CityEnschede
    Period30/09/0430/09/04
    Other(MESA+ Dag/Meeting)

    Cite this

    van Essen, M. C., Sesé, J., Fernandez, L. J., Reitsema, J. M., Wiegerink, R. J., & Flokstra, J. (2004). Characterisation of capacitive MEMs at cryogenic temperatures. Poster session presented at MESA+ Day 2004, Enschede, Netherlands.