Characterization and optimization of mono-crystalline in-plane operating check valves

R.E. Oosterbroek; Johan W. Berenschot; Stefan Schlautmann; Theodorus S.J. Lammerink; Gijsbertus J.M. Krijnen; Michael Curt Elwenspoek; Albert van den Berg

Characterization and optimization of mono-crystalline in-plane operating check valves

R.E. Oosterbroek, Johan W. Berenschot, Stefan Schlautmann, Theodorus S.J. Lammerink, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek, Albert van den Berg

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings IEEE International Conference on Solid-State Sensors and Actuators, Transducers '99
Place of Publication	Sendai, Japan
Pages	1816-1819
Publication status	Published - 6 Jun 1999
Event	10th IEEE International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 99 - Sendai, Japan Duration: 7 Jun 1999 → 10 Jun 1999

Conference

Conference	10th IEEE International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 99
Period	7/06/99 → 10/06/99
Other	7-10 June 1999

Keywords

METIS-112706
IR-15824

Cite this

@inproceedings{55a9889d44aa4691a2cbf70d9afe2571,

title = "Characterization and optimization of mono-crystalline in-plane operating check valves",

keywords = "METIS-112706, IR-15824",

author = "R.E. Oosterbroek and Berenschot, {Johan W.} and Stefan Schlautmann and Lammerink, {Theodorus S.J.} and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt} and {van den Berg}, Albert",

year = "1999",

month = jun,

day = "6",

language = "Undefined",

pages = "1816--1819",

booktitle = "Proceedings IEEE International Conference on Solid-State Sensors and Actuators, Transducers '99",

note = "null ; Conference date: 07-06-1999 Through 10-06-1999",

}

Oosterbroek, RE, Berenschot, JW , Schlautmann, S , Lammerink, TSJ , Krijnen, GJM, Elwenspoek, MC & van den Berg, A 1999, Characterization and optimization of mono-crystalline in-plane operating check valves. in Proceedings IEEE International Conference on Solid-State Sensors and Actuators, Transducers '99. Sendai, Japan, pp. 1816-1819, 10th IEEE International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 99, 7/06/99.

Characterization and optimization of mono-crystalline in-plane operating check valves. / Oosterbroek, R.E.; Berenschot, Johan W.; Schlautmann, Stefan et al.

Proceedings IEEE International Conference on Solid-State Sensors and Actuators, Transducers '99. Sendai, Japan, 1999. p. 1816-1819.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Characterization and optimization of mono-crystalline in-plane operating check valves

AU - Oosterbroek, R.E.

AU - Berenschot, Johan W.

AU - Schlautmann, Stefan

AU - Lammerink, Theodorus S.J.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

AU - van den Berg, Albert

PY - 1999/6/6

Y1 - 1999/6/6

KW - METIS-112706

KW - IR-15824

M3 - Conference contribution

SP - 1816

EP - 1819

BT - Proceedings IEEE International Conference on Solid-State Sensors and Actuators, Transducers '99

CY - Sendai, Japan

Y2 - 7 June 1999 through 10 June 1999

ER -