Characterization of a two-stage 30 K Joule–Thomson microcooler

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Abstract

Micromachined cryocoolers are attractive tools for cooling electronic chips and devices to cryogenic temperatures. A two-stage 30 K microcooler operating with nitrogen and hydrogen gas is fabricated using micromachining technology. The nitrogen and hydrogen stages cool down to about 94 and 30 K, respectively, using Joule–Thomson expansion in a restriction with a height of 1.10 μm. The nitrogen stage is typically operated between 1.1 bar at the low-pressure side and 85.1 bar at the high-pressure side. The hydrogen stage has a low pressure of 5.7 bar, whereas the high pressure is varied between 45.5 and 60.4 bar. In changing the pressure settings, the cooling power can more or less be exchanged between the two stages. These typically range from 21 to 84 mW at 95 K at the nitrogen stage, corresponding to 30 to 5 mW at 31–32 K at the hydrogen stage. This paper discusses the characterization of this two-stage microcooler. Experimental results on cool down and cooling power are compared to dynamic modeling predictions
Original languageEnglish
Article number065022
Pages (from-to)065022-1-065022-7
Number of pages7
JournalJournal of micromechanics and microengineering
Volume23
Issue number6
DOIs
Publication statusPublished - 2013

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Hydrogen
Nitrogen
Electronic cooling
Cooling
Micromachining
Cryogenics
Gases
Temperature

Keywords

  • IR-87010
  • METIS-297295

Cite this

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title = "Characterization of a two-stage 30 K Joule–Thomson microcooler",
abstract = "Micromachined cryocoolers are attractive tools for cooling electronic chips and devices to cryogenic temperatures. A two-stage 30 K microcooler operating with nitrogen and hydrogen gas is fabricated using micromachining technology. The nitrogen and hydrogen stages cool down to about 94 and 30 K, respectively, using Joule–Thomson expansion in a restriction with a height of 1.10 μm. The nitrogen stage is typically operated between 1.1 bar at the low-pressure side and 85.1 bar at the high-pressure side. The hydrogen stage has a low pressure of 5.7 bar, whereas the high pressure is varied between 45.5 and 60.4 bar. In changing the pressure settings, the cooling power can more or less be exchanged between the two stages. These typically range from 21 to 84 mW at 95 K at the nitrogen stage, corresponding to 30 to 5 mW at 31–32 K at the hydrogen stage. This paper discusses the characterization of this two-stage microcooler. Experimental results on cool down and cooling power are compared to dynamic modeling predictions",
keywords = "IR-87010, METIS-297295",
author = "Haishan Cao and Holland, {Herman J.} and Vermeer, {Cristian Hendrik} and Srinivas Vanapalli and P.P.M. Lerou and M. Blom and {ter Brake}, {Hermanus J.M.}",
year = "2013",
doi = "10.1088/0960-1317/23/6/065022",
language = "English",
volume = "23",
pages = "065022--1--065022--7",
journal = "Journal of micromechanics and microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
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}

Characterization of a two-stage 30 K Joule–Thomson microcooler. / Cao, Haishan; Holland, Herman J.; Vermeer, Cristian Hendrik; Vanapalli, Srinivas; Lerou, P.P.M.; Blom, M.; ter Brake, Hermanus J.M.

In: Journal of micromechanics and microengineering, Vol. 23, No. 6, 065022, 2013, p. 065022-1-065022-7.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Characterization of a two-stage 30 K Joule–Thomson microcooler

AU - Cao, Haishan

AU - Holland, Herman J.

AU - Vermeer, Cristian Hendrik

AU - Vanapalli, Srinivas

AU - Lerou, P.P.M.

AU - Blom, M.

AU - ter Brake, Hermanus J.M.

PY - 2013

Y1 - 2013

N2 - Micromachined cryocoolers are attractive tools for cooling electronic chips and devices to cryogenic temperatures. A two-stage 30 K microcooler operating with nitrogen and hydrogen gas is fabricated using micromachining technology. The nitrogen and hydrogen stages cool down to about 94 and 30 K, respectively, using Joule–Thomson expansion in a restriction with a height of 1.10 μm. The nitrogen stage is typically operated between 1.1 bar at the low-pressure side and 85.1 bar at the high-pressure side. The hydrogen stage has a low pressure of 5.7 bar, whereas the high pressure is varied between 45.5 and 60.4 bar. In changing the pressure settings, the cooling power can more or less be exchanged between the two stages. These typically range from 21 to 84 mW at 95 K at the nitrogen stage, corresponding to 30 to 5 mW at 31–32 K at the hydrogen stage. This paper discusses the characterization of this two-stage microcooler. Experimental results on cool down and cooling power are compared to dynamic modeling predictions

AB - Micromachined cryocoolers are attractive tools for cooling electronic chips and devices to cryogenic temperatures. A two-stage 30 K microcooler operating with nitrogen and hydrogen gas is fabricated using micromachining technology. The nitrogen and hydrogen stages cool down to about 94 and 30 K, respectively, using Joule–Thomson expansion in a restriction with a height of 1.10 μm. The nitrogen stage is typically operated between 1.1 bar at the low-pressure side and 85.1 bar at the high-pressure side. The hydrogen stage has a low pressure of 5.7 bar, whereas the high pressure is varied between 45.5 and 60.4 bar. In changing the pressure settings, the cooling power can more or less be exchanged between the two stages. These typically range from 21 to 84 mW at 95 K at the nitrogen stage, corresponding to 30 to 5 mW at 31–32 K at the hydrogen stage. This paper discusses the characterization of this two-stage microcooler. Experimental results on cool down and cooling power are compared to dynamic modeling predictions

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JO - Journal of micromechanics and microengineering

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