TY - JOUR
T1 - Characterization of angularly resolved EUV emission from 2-µm-wavelength laser-driven Sn plasmas using preformed liquid disk targets
AU - Schupp, Ruben
AU - Behnke, Lars
AU - Bouza, Zoi
AU - Mazzotta, Zeudi
AU - Mostafa, Yahia
AU - Lassise, Adam
AU - Poirier, L
AU - Sheil, J.
AU - Bayraktar, Muharrem
AU - Ubachs, Wim
AU - Hoekstra, Ronnie
AU - Versolato, Oscar
N1 - Funding Information:
Original content from this work may be used under the terms of the . Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. University of Twente http://dx.doi.org/10.13039/501100001834 Dutch Research Council (NWO) VIDI grant number 15697 University of Amsterdam (UvA) European Research Council (ERC) Starting Grant number 802648 Vrije Universiteit Amsterdam http://dx.doi.org/10.13039/501100001833 FOM FOM Valorisation Prize 2011 NanoNextNL Valorization Grant yes � 2021 The Author(s). Published by IOP Publishing Ltd Creative Commons Attribution 4.0 license
Funding Information:
This work has been carried out at the Advanced Research Center for Nanolithography (ARCNL), a public-private partnership of the University of Amsterdam (UvA), the Vrije Universiteit Amsterdam (VU), the Dutch Research Council (NWO) and the semiconductor equipment manufacturer ASML. The used transmission grating spectrometer has been developed in the Industrial Focus Group XUV Optics at University of Twente, and supported by the FOM Valorisation Prize 2011 awarded to F Bijkerk and NanoNextNL Valorization Grant awarded to M Bayraktar in 2015. This project has received funding from European Research Council (ERC) Starting Grant number 802648. This publication is part of the project New Light for Nanolithography (with Project Number 15697) of the research programme VIDI which is (partly) financed by the Dutch Research Council (NWO).
Publisher Copyright:
© 2021 The Author(s).
PY - 2021/6/28
Y1 - 2021/6/28
N2 - The emission properties of tin plasmas, produced by the irradiation of preformed liquid tin targets by several-ns-long 2 µm-wavelength laser pulses, are studied in the extreme ultraviolet (EUV) regime. In a two-pulse scheme, a pre-pulse laser is first used to deform tin microdroplets into thin, extended disks before the main (2 µm) pulse creates the EUV-emitting plasma. Irradiating 30- to 300 µm-diameter targets with 2 µm laser pulses, we find that the efficiency in creating EUV light around 13.5 nm follows the fraction of laser light that overlaps with the target. Next, the effects of a change in 2 µm drive laser intensity (0.6–1.8 × 1011 W cm−2) and pulse duration (3.7–7.4 ns) are studied. It is found that the angular dependence of the emission of light within a 2% bandwidth around 13.5 nm and within the backward 2π hemisphere around the incoming laser beam is almost independent of intensity and duration of the 2 µm drive laser. With increasing target diameter, the emission in this 2% bandwidth becomes increasingly anisotropic, with a greater fraction of light being emitted into the hemisphere of the incoming laser beam. For direct comparison, a similar set of experiments is performed with a 1 µm-wavelength drive laser. Emission spectra, recorded in a 5.5–25.5 nm wavelength range, show significant self-absorption of light around 13.5 nm in the 1 µm case, while in the 2 µm case only an opacity-related broadening of the spectral feature at 13.5 nm is observed. This work demonstrates the enhanced capabilities and performance of 2 µm-driven plasmas produced from disk targets when compared to 1 µm-driven plasmas, providing strong motivation for the use of 2 µm lasers as drive lasers in future high-power sources of EUV light.
AB - The emission properties of tin plasmas, produced by the irradiation of preformed liquid tin targets by several-ns-long 2 µm-wavelength laser pulses, are studied in the extreme ultraviolet (EUV) regime. In a two-pulse scheme, a pre-pulse laser is first used to deform tin microdroplets into thin, extended disks before the main (2 µm) pulse creates the EUV-emitting plasma. Irradiating 30- to 300 µm-diameter targets with 2 µm laser pulses, we find that the efficiency in creating EUV light around 13.5 nm follows the fraction of laser light that overlaps with the target. Next, the effects of a change in 2 µm drive laser intensity (0.6–1.8 × 1011 W cm−2) and pulse duration (3.7–7.4 ns) are studied. It is found that the angular dependence of the emission of light within a 2% bandwidth around 13.5 nm and within the backward 2π hemisphere around the incoming laser beam is almost independent of intensity and duration of the 2 µm drive laser. With increasing target diameter, the emission in this 2% bandwidth becomes increasingly anisotropic, with a greater fraction of light being emitted into the hemisphere of the incoming laser beam. For direct comparison, a similar set of experiments is performed with a 1 µm-wavelength drive laser. Emission spectra, recorded in a 5.5–25.5 nm wavelength range, show significant self-absorption of light around 13.5 nm in the 1 µm case, while in the 2 µm case only an opacity-related broadening of the spectral feature at 13.5 nm is observed. This work demonstrates the enhanced capabilities and performance of 2 µm-driven plasmas produced from disk targets when compared to 1 µm-driven plasmas, providing strong motivation for the use of 2 µm lasers as drive lasers in future high-power sources of EUV light.
KW - UT-Hybrid-D
U2 - 10.1088/1361-6463/ac0b70
DO - 10.1088/1361-6463/ac0b70
M3 - Article
SN - 0022-3727
VL - 54
JO - Journal of physics D: applied physics
JF - Journal of physics D: applied physics
IS - 36
M1 - 365103
ER -