Characterization of Bragg gratings in Al2O3 waveguides fabricated by focused ion beam milling and laser interference lithography

F. Ay, E. Bernhardi, L. Agazzi, J. Bradley, K. Wörhoff, M. Pollnau, R.M. de Ridder

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    Optical grating cavities in Al2O3 channel waveguides were successfully defined by focused ion beam milling and laser interference lithography. Both methods are shown to be suitable for realizing resonant structures for on-chip waveguide lasers.
    Original languageEnglish
    Title of host publicationConference on Lasers and Electro-Optics 2010
    Subtitle of host publicationSan Jose, CA, United States, 16–21 May 2010
    Place of PublicationWashington, D.C.
    PublisherOptical Society of America
    PagesCMQ4
    Number of pages2
    ISBN (Print)978-1-55752-889-6
    DOIs
    Publication statusPublished - 1 May 2010
    EventConference on Lasers and Electro-Optics, CLEO/QELS 2010 - San Jose, United States
    Duration: 16 May 201021 May 2010

    Conference

    ConferenceConference on Lasers and Electro-Optics, CLEO/QELS 2010
    Abbreviated titleCLEO/QELS
    Country/TerritoryUnited States
    CitySan Jose
    Period16/05/1021/05/10

    Keywords

    • Rare earth doped materials
    • IOMS-APD: Active Photonic Devices
    • Optical resonators
    • Integrated Optics devices

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