Characterization of Bragg gratings in Al2O3 waveguides fabricated by focused ion beam milling and laser interference lithography

F. Ay, Edward Bernhardi, L. Agazzi, J. Bradley, Kerstin Worhoff, Markus Pollnau, R.M. de Ridder

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    Optical grating cavities in Al2O3 channel waveguides were successfully defined by focused ion beam milling and laser interference lithography. Both methods are shown to be suitable for realizing resonant structures for on-chip waveguide lasers.
    Original languageUndefined
    Title of host publicationConference on Lasers and Electro-Optics
    Place of PublicationWashington, D.C.
    PublisherOptical Society of America
    PagesCMQ4
    Number of pages2
    ISBN (Print)978-1-55752-889-6
    Publication statusPublished - May 2010
    EventConference on Lasers and Electro-Optics, CLEO/QELS 2010 - San Jose, United States
    Duration: 16 May 201021 May 2010

    Publication series

    Name
    PublisherOptical Society of America

    Conference

    ConferenceConference on Lasers and Electro-Optics, CLEO/QELS 2010
    Abbreviated titleCLEO/QELS
    CountryUnited States
    CitySan Jose
    Period16/05/1021/05/10

    Keywords

    • METIS-276033
    • IR-72276
    • Rare earth doped materials
    • IOMS-APD: Active Photonic Devices
    • EWI-17909
    • Optical resonators
    • Integrated Optics devices

    Cite this