Characterization of capacitive MEMS at cryogenic temperatures

M.C. van Essen, J. Sesé, L.J. Fernandez, J.M. Reitsema, Remco J. Wiegerink, Jakob Flokstra

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Original languageUndefined
    Title of host publicationMME 2004 Proceedings
    Pages92-95
    Number of pages4
    Publication statusPublished - 5 Sep 2004
    Event15th MicroMechanics Europe Workshop, MME 2004 - Leuven, Belgium
    Duration: 5 Sep 20047 Sep 2004
    Conference number: 15

    Workshop

    Workshop15th MicroMechanics Europe Workshop, MME 2004
    Abbreviated titleMME
    CountryBelgium
    CityLeuven
    Period5/09/047/09/04

    Keywords

    • METIS-219834

    Cite this

    van Essen, M. C., Sesé, J., Fernandez, L. J., Reitsema, J. M., Wiegerink, R. J., & Flokstra, J. (2004). Characterization of capacitive MEMS at cryogenic temperatures. In MME 2004 Proceedings (pp. 92-95)
    van Essen, M.C. ; Sesé, J. ; Fernandez, L.J. ; Reitsema, J.M. ; Wiegerink, Remco J. ; Flokstra, Jakob. / Characterization of capacitive MEMS at cryogenic temperatures. MME 2004 Proceedings. 2004. pp. 92-95
    @inproceedings{97e493d220864373aa2fc313fa70381f,
    title = "Characterization of capacitive MEMS at cryogenic temperatures",
    keywords = "METIS-219834",
    author = "{van Essen}, M.C. and J. Ses{\'e} and L.J. Fernandez and J.M. Reitsema and Wiegerink, {Remco J.} and Jakob Flokstra",
    year = "2004",
    month = "9",
    day = "5",
    language = "Undefined",
    pages = "92--95",
    booktitle = "MME 2004 Proceedings",

    }

    van Essen, MC, Sesé, J, Fernandez, LJ, Reitsema, JM, Wiegerink, RJ & Flokstra, J 2004, Characterization of capacitive MEMS at cryogenic temperatures. in MME 2004 Proceedings. pp. 92-95, 15th MicroMechanics Europe Workshop, MME 2004, Leuven, Belgium, 5/09/04.

    Characterization of capacitive MEMS at cryogenic temperatures. / van Essen, M.C.; Sesé, J.; Fernandez, L.J.; Reitsema, J.M.; Wiegerink, Remco J.; Flokstra, Jakob.

    MME 2004 Proceedings. 2004. p. 92-95.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    TY - GEN

    T1 - Characterization of capacitive MEMS at cryogenic temperatures

    AU - van Essen, M.C.

    AU - Sesé, J.

    AU - Fernandez, L.J.

    AU - Reitsema, J.M.

    AU - Wiegerink, Remco J.

    AU - Flokstra, Jakob

    PY - 2004/9/5

    Y1 - 2004/9/5

    KW - METIS-219834

    M3 - Conference contribution

    SP - 92

    EP - 95

    BT - MME 2004 Proceedings

    ER -

    van Essen MC, Sesé J, Fernandez LJ, Reitsema JM, Wiegerink RJ, Flokstra J. Characterization of capacitive MEMS at cryogenic temperatures. In MME 2004 Proceedings. 2004. p. 92-95