Characterization of capacitive MEMS at cryogenic temperatures

M.C. van Essen, J. Sesé, L.J. Fernandez, J.M. Reitsema, Remco J. Wiegerink, Jakob Flokstra

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Original languageUndefined
    Title of host publicationMME 2004 Proceedings
    Pages92-95
    Number of pages4
    Publication statusPublished - 5 Sep 2004
    Event15th MicroMechanics Europe Workshop, MME 2004 - Leuven, Belgium
    Duration: 5 Sep 20047 Sep 2004
    Conference number: 15

    Workshop

    Workshop15th MicroMechanics Europe Workshop, MME 2004
    Abbreviated titleMME
    CountryBelgium
    CityLeuven
    Period5/09/047/09/04

    Keywords

    • METIS-219834

    Cite this

    van Essen, M. C., Sesé, J., Fernandez, L. J., Reitsema, J. M., Wiegerink, R. J., & Flokstra, J. (2004). Characterization of capacitive MEMS at cryogenic temperatures. In MME 2004 Proceedings (pp. 92-95)