Characterization of capacitive MEMS at cryogenic temperatures

M.C. van Essen, J. Sesé, L.J. Fernandez, J.M. Reitsema, Remco J. Wiegerink, Jakob Flokstra

Research output: Contribution to conference › Poster › Other research output

Original language	English
Number of pages	1
Publication status	Published - 5 Sept 2004
Event	15th MicroMechanics Europe Workshop, MME 2004 - Leuven, Belgium Duration: 5 Sept 2004 → 7 Sept 2004 Conference number: 15

Workshop	15th MicroMechanics Europe Workshop, MME 2004
Abbreviated title	MME
Country/Territory	Belgium
City	Leuven
Period	5/09/04 → 7/09/04

Characterization of capacitive MEMs at cryogenic temperatures
van Essen, M. C., Sesé, J., Fernandez, L. J., Reitsema, J. M., Wiegerink, R. J. & Flokstra, J., 30 Sept 2004. 1 p.
Research output: Contribution to conference › Poster › Other research output
Characterization of Capacitive MEMS at Cryogenic Temperatures
van Essen, M. C., Fernandez, L. J., Reitsema, J. M., Wiegerink, R. J., Sesé, J. & Flokstra, J., 2004, Proceedings 6th European Workshop on Low Temperature Electronics, WOLTE-6: 23-25 June, 2004, ESTEC, Noordwijk, The Netherlands. Noordwijk: ESA, p. 137-143 7 p.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Cite this

@conference{5e0a79518ad045ce8352aae3757720c6,

title = "Characterization of capacitive MEMS at cryogenic temperatures",

author = "{van Essen}, M.C. and J. Ses{\'e} and L.J. Fernandez and J.M. Reitsema and Wiegerink, {Remco J.} and Jakob Flokstra",

year = "2004",

month = sep,

day = "5",

language = "English",

note = "15th MicroMechanics Europe Workshop, MME 2004, MME ; Conference date: 05-09-2004 Through 07-09-2004",

}