Characterization of capacitive MEMs at cryogenic temperatures

M.C. van Essen, J. Sesé, L.J. Fernandez, J.M. Reitsema, R.J. Wiegerink, J. Flokstra

Research output: Contribution to conference › Poster › Other research output

Original language	English
Number of pages	1
Publication status	Published - 30 Sept 2004
Event	MESA+ Day 2004 - Cinestar, Enschede, Netherlands Duration: 30 Sept 2004 → 30 Sept 2004

Characterization of capacitive MEMS at cryogenic temperatures
van Essen, M. C., Sesé, J., Fernandez, L. J., Reitsema, J. M., Wiegerink, R. J. & Flokstra, J., 5 Sept 2004. 1 p.
Research output: Contribution to conference › Poster › Other research output
Characterization of Capacitive MEMS at Cryogenic Temperatures
van Essen, M. C., Fernandez, L. J., Reitsema, J. M., Wiegerink, R. J., Sesé, J. & Flokstra, J., 2004, Proceedings 6th European Workshop on Low Temperature Electronics, WOLTE-6: 23-25 June, 2004, ESTEC, Noordwijk, The Netherlands. Noordwijk: ESA, p. 137-143 7 p.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Cite this

@conference{340cdf33c3d748d6bf0b69d9aebb09b5,

title = "Characterization of capacitive MEMs at cryogenic temperatures",

author = "{van Essen}, M.C. and J. Ses{\'e} and L.J. Fernandez and J.M. Reitsema and R.J. Wiegerink and J. Flokstra",

year = "2004",

month = sep,

day = "30",

language = "English",

note = "MESA+ Day 2004 ; Conference date: 30-09-2004 Through 30-09-2004",

}