Characterization of EUV induced carbon films using laser-generated surface acoustic waves

Juequan Chen, Christopher James Lee, Eric Louis, Frederik Bijkerk, Reinhard Kunze, Hagen Schmidt, Dieter Schneider, Roel Moors

Research output: Contribution to journalArticleAcademicpeer-review

14 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science