Characterization of Laminated CeO2-HfO2 High-K Gate Delectrics Deposited by Pulsed Laser Deposition

K. Karakaya; A. Zinine; J.G.M. van Berkum; P. Graat; M.A. Verheijen; Z.M. Rittersma; Augustinus J.H.M. Rijnders; David H.A. Blank

Characterization of Laminated CeO2-HfO2 High-K Gate Delectrics Deposited by Pulsed Laser Deposition

K. Karakaya, A. Zinine, J.G.M. van Berkum, P. Graat, M.A. Verheijen, Z.M. Rittersma, Augustinus J.H.M. Rijnders, David H.A. Blank

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 15 May 2005
Event	207th ECS Meeting - Quebec City, Canada Duration: 15 May 2005 → 20 May 2005

Conference

Conference	207th ECS Meeting
City	Quebec City, Canada
Period	15/05/05 → 20/05/05

Keywords

METIS-228657

Cite this

@conference{6b342d0e8eb24f80954abeaee0fc39b8,

title = "Characterization of Laminated CeO2-HfO2 High-K Gate Delectrics Deposited by Pulsed Laser Deposition",

keywords = "METIS-228657",

author = "K. Karakaya and A. Zinine and {van Berkum}, J.G.M. and P. Graat and M.A. Verheijen and Z.M. Rittersma and Rijnders, {Augustinus J.H.M.} and Blank, {David H.A.}",

year = "2005",

month = may,

day = "15",

language = "Undefined",

pages = "--",

note = "207th ECS Meeting ; Conference date: 15-05-2005 Through 20-05-2005",

}

TY - CONF

T1 - Characterization of Laminated CeO2-HfO2 High-K Gate Delectrics Deposited by Pulsed Laser Deposition

AU - Karakaya, K.

AU - Zinine, A.

AU - van Berkum, J.G.M.

AU - Graat, P.

AU - Verheijen, M.A.

AU - Rittersma, Z.M.

AU - Rijnders, Augustinus J.H.M.

AU - Blank, David H.A.

PY - 2005/5/15

Y1 - 2005/5/15

KW - METIS-228657

M3 - Poster

SP - -

T2 - 207th ECS Meeting

Y2 - 15 May 2005 through 20 May 2005

ER -