Characterization of Laminated CeO2-HfO2 High-K Gate Delectrics Deposited by Pulsed Laser Deposition

K. Karakaya, A. Zinine, J.G.M. van Berkum, P. Graat, M.A. Verheijen, Z.M. Rittersma, Augustinus J.H.M. Rijnders, David H.A. Blank

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 15 May 2005
Event207th ECS Meeting - Quebec City, Canada
Duration: 15 May 200520 May 2005

Conference

Conference207th ECS Meeting
CityQuebec City, Canada
Period15/05/0520/05/05

Keywords

  • METIS-228657

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