Characterization of large off-axis EUV mirrors with high accuracy reflectometry at PTB

Christian Laubis*, Christian Buchholz, Andreas Fischer, Sven Plöger, Frank Scholz, Heike Wagner, Frank Scholze, Gerhard Ulm, Hartmut Enkisch, Stephan Müllender, Marco Wedowski, Eric Louis, Erwin Zoethout

*Corresponding author for this work

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