Characterization of micromachined cryogenic coolers

P.P.M. Lerou, H.J.M. ter Brake, J.F. Burger, H.J. Holland, H. Rogalla

    Research output: Contribution to journalArticleAcademicpeer-review

    29 Citations (Scopus)


    Micro cryogenic coolers can be used to cool small circuitry and improve their performance. The authors present a variety of micro coolers which are fabricated using MEMS technology production processes only. The typical dimension of a micro cold stage is 30 × 2.2 × 0.5 mm. It cools down to 96 K, applying Joule–Thomson expansion in a 300 nm high flow restriction and has a cooling power ranging from 10 mW to 25 mW. This paper discusses the operation of the micro cold stage and the characterization measurements done.
    Original languageEnglish
    Pages (from-to)1956-1960
    Number of pages5
    JournalJournal of micromechanics and microengineering
    Issue number10
    Publication statusPublished - 2007


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