Characterization of micromachined cryogenic coolers

P.P.M. Lerou; H.J.M. ter Brake; J.F. Burger; H.J. Holland; H. Rogalla

doi:10.1088/0960-1317/17/10/005

Characterization of micromachined cryogenic coolers

P.P.M. Lerou, H.J.M. ter Brake, J.F. Burger, H.J. Holland, H. Rogalla

Research output: Contribution to journal › Article › Academic › peer-review

29 Citations (Scopus)

Abstract

Micro cryogenic coolers can be used to cool small circuitry and improve their performance. The authors present a variety of micro coolers which are fabricated using MEMS technology production processes only. The typical dimension of a micro cold stage is 30 × 2.2 × 0.5 mm. It cools down to 96 K, applying Joule–Thomson expansion in a 300 nm high flow restriction and has a cooling power ranging from 10 mW to 25 mW. This paper discusses the operation of the micro cold stage and the characterization measurements done.

Original language	English
Pages (from-to)	1956-1960
Number of pages	5
Journal	Journal of micromechanics and microengineering
Volume	17
Issue number	10
DOIs	https://doi.org/10.1088/0960-1317/17/10/005
Publication status	Published - 2007

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AB - Micro cryogenic coolers can be used to cool small circuitry and improve their performance. The authors present a variety of micro coolers which are fabricated using MEMS technology production processes only. The typical dimension of a micro cold stage is 30 × 2.2 × 0.5 mm. It cools down to 96 K, applying Joule–Thomson expansion in a 300 nm high flow restriction and has a cooling power ranging from 10 mW to 25 mW. This paper discusses the operation of the micro cold stage and the characterization measurements done.

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JO - Journal of micromechanics and microengineering

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Characterization of micromachined cryogenic coolers

Abstract

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