Characterization of micromachined cryogenic coolers

    Research output: Contribution to journalArticleAcademicpeer-review

    27 Citations (Scopus)
    Original languageUndefined
    Pages (from-to)1956-1960
    Number of pages5
    JournalJournal of micromechanics and microengineering
    Volume17
    Publication statusPublished - 2007

    Keywords

    • METIS-243491

    Cite this