Characterization of piezoelectrically actuated PLD Pb(Zr,Ti)O3 thin film membranes

Ö. Sardan Sukas, H. Yagubizade, Johan W. Berenschot, Meint J. de Boer, Duc Minh Nguyen, Leon Abelmann

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Abstract

In our previous work, we presented a novel technique for fabricating Transmission Electron Microscopy (TEM) chips in order to investigate structural and piezoelectric properties of Pulsed Laser Deposited (PLD) Lead Zirconium Titanate (Pb(Zr,Ti)O3) (PZT) thin films. We accomplished the fabrication of the devices we presented last year and obtained fully functional PLD PZT membranes. In this paper, we present the results of the fabrication process, which involves silicon-on-insulator (SOI) wafer technology together with deep reactive ion etching (DRIE) and highly selective etchants. In addition, we demonstrate the functionality of the membranes by piezoelectric actuation and characterized a selected membrane design through a set of experiments including X-ray diffraction (XRD), residual stress and frequency analyses.
Original languageUndefined
Title of host publication23rd Micromechanics and Microsystems Europe Workshop, MME 2012
Place of PublicationIlmenau
PublisherIlmenau University of Technology
PagesC9
Number of pages4
ISBN (Print)978-3-938843-71-0
Publication statusPublished - 2012
Event23rd Micromechanics and Microsystems Europe Workshop, MME 2012 - Ilmenau, Germany
Duration: 9 Sep 201212 Sep 2012
Conference number: 23

Publication series

Name
PublisherIlmenau University of Technology

Workshop

Workshop23rd Micromechanics and Microsystems Europe Workshop, MME 2012
Abbreviated titleMME
CountryGermany
CityIlmenau
Period9/09/1212/09/12

Keywords

  • EWI-22525
  • TST-SENSORS
  • TST-ACTUATORS
  • Frequency Response
  • MEMS
  • METIS-293195
  • Residual Stress
  • Pulsed Laser Deposition (PLD)
  • Thin Film Membrane
  • IR-82693
  • Lead Zirconium Titanate (PZT)

Cite this

Sardan Sukas, Ö., Yagubizade, H., Berenschot, J. W., de Boer, M. J., Nguyen, D. M., & Abelmann, L. (2012). Characterization of piezoelectrically actuated PLD Pb(Zr,Ti)O3 thin film membranes. In 23rd Micromechanics and Microsystems Europe Workshop, MME 2012 (pp. C9). Ilmenau: Ilmenau University of Technology.