Characterization of piezoelectrically actuated PLD Pb(Zr,Ti)O3 thin film membranes

Ö. Sardan Sukas; H. Yagubizade; Johan W. Berenschot; Meint J. de Boer; Duc Minh Nguyen; Leon Abelmann

Characterization of piezoelectrically actuated PLD Pb(Zr,Ti)O₃ thin film membranes

Ö. Sardan Sukas, H. Yagubizade, Johan W. Berenschot, Meint J. de Boer, Duc Minh Nguyen, Leon Abelmann

Inorganic Materials Science

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Abstract

In our previous work, we presented a novel technique for fabricating Transmission Electron Microscopy (TEM) chips in order to investigate structural and piezoelectric properties of Pulsed Laser Deposited (PLD) Lead Zirconium Titanate (Pb(Zr,Ti)O3) (PZT) thin films. We accomplished the fabrication of the devices we presented last year and obtained fully functional PLD PZT membranes. In this paper, we present the results of the fabrication process, which involves silicon-on-insulator (SOI) wafer technology together with deep reactive ion etching (DRIE) and highly selective etchants. In addition, we demonstrate the functionality of the membranes by piezoelectric actuation and characterized a selected membrane design through a set of experiments including X-ray diffraction (XRD), residual stress and frequency analyses.

Original language	Undefined
Title of host publication	23rd Micromechanics and Microsystems Europe Workshop, MME 2012
Place of Publication	Ilmenau
Publisher	Ilmenau University of Technology
Pages	C9
Number of pages	4
ISBN (Print)	978-3-938843-71-0
Publication status	Published - 2012
Event	23rd Micromechanics and Microsystems Europe Workshop, MME 2012 - Ilmenau, Germany Duration: 9 Sept 2012 → 12 Sept 2012 Conference number: 23

Publication series

Name
Publisher	Ilmenau University of Technology

Workshop

Workshop	23rd Micromechanics and Microsystems Europe Workshop, MME 2012
Abbreviated title	MME
Country/Territory	Germany
City	Ilmenau
Period	9/09/12 → 12/09/12

Keywords

EWI-22525
TST-SENSORS
TST-ACTUATORS
Frequency Response
MEMS
METIS-293195
Residual Stress
Pulsed Laser Deposition (PLD)
Thin Film Membrane
IR-82693
Lead Zirconium Titanate (PZT)

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Cite this

Sardan Sukas, Ö., Yagubizade, H., Berenschot, J. W., de Boer, M. J., Nguyen, D. M., & Abelmann, L. (2012). Characterization of piezoelectrically actuated PLD Pb(Zr,Ti)O₃ thin film membranes. In 23rd Micromechanics and Microsystems Europe Workshop, MME 2012 (pp. C9). Ilmenau University of Technology. http://eprints.eemcs.utwente.nl/secure2/22525/01/C09_1689_MME2012_120702.pdf

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title = "Characterization of piezoelectrically actuated PLD Pb(Zr,Ti)O3 thin film membranes",

abstract = "In our previous work, we presented a novel technique for fabricating Transmission Electron Microscopy (TEM) chips in order to investigate structural and piezoelectric properties of Pulsed Laser Deposited (PLD) Lead Zirconium Titanate (Pb(Zr,Ti)O3) (PZT) thin films. We accomplished the fabrication of the devices we presented last year and obtained fully functional PLD PZT membranes. In this paper, we present the results of the fabrication process, which involves silicon-on-insulator (SOI) wafer technology together with deep reactive ion etching (DRIE) and highly selective etchants. In addition, we demonstrate the functionality of the membranes by piezoelectric actuation and characterized a selected membrane design through a set of experiments including X-ray diffraction (XRD), residual stress and frequency analyses.",

keywords = "EWI-22525, TST-SENSORS, TST-ACTUATORS, Frequency Response, MEMS, METIS-293195, Residual Stress, Pulsed Laser Deposition (PLD), Thin Film Membrane, IR-82693, Lead Zirconium Titanate (PZT)",

author = "{Sardan Sukas}, {\"O}. and H. Yagubizade and Berenschot, {Johan W.} and {de Boer}, {Meint J.} and Nguyen, {Duc Minh} and Leon Abelmann",

note = "eemcs-eprint-22525 ; 23rd Micromechanics and Microsystems Europe Workshop, MME 2012 ; Conference date: 09-09-2012 Through 12-09-2012",

year = "2012",

language = "Undefined",

isbn = "978-3-938843-71-0",

publisher = "Ilmenau University of Technology",

pages = "C9",

booktitle = "23rd Micromechanics and Microsystems Europe Workshop, MME 2012",

}

Sardan Sukas, Ö, Yagubizade, H, Berenschot, JW, de Boer, MJ, Nguyen, DM & Abelmann, L 2012, Characterization of piezoelectrically actuated PLD Pb(Zr,Ti)O₃ thin film membranes. in 23rd Micromechanics and Microsystems Europe Workshop, MME 2012. Ilmenau University of Technology, Ilmenau, pp. C9, 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, Ilmenau, Germany, 9/09/12. <http://eprints.eemcs.utwente.nl/secure2/22525/01/C09_1689_MME2012_120702.pdf>

Characterization of piezoelectrically actuated PLD Pb(Zr,Ti)O₃ thin film membranes. / Sardan Sukas, Ö.; Yagubizade, H.; Berenschot, Johan W. et al.
23rd Micromechanics and Microsystems Europe Workshop, MME 2012. Ilmenau: Ilmenau University of Technology, 2012. p. C9.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Characterization of piezoelectrically actuated PLD Pb(Zr,Ti)O3 thin film membranes

AU - Sardan Sukas, Ö.

AU - Yagubizade, H.

AU - Berenschot, Johan W.

AU - de Boer, Meint J.

AU - Nguyen, Duc Minh

AU - Abelmann, Leon

N1 - Conference code: 23

PY - 2012

Y1 - 2012

N2 - In our previous work, we presented a novel technique for fabricating Transmission Electron Microscopy (TEM) chips in order to investigate structural and piezoelectric properties of Pulsed Laser Deposited (PLD) Lead Zirconium Titanate (Pb(Zr,Ti)O3) (PZT) thin films. We accomplished the fabrication of the devices we presented last year and obtained fully functional PLD PZT membranes. In this paper, we present the results of the fabrication process, which involves silicon-on-insulator (SOI) wafer technology together with deep reactive ion etching (DRIE) and highly selective etchants. In addition, we demonstrate the functionality of the membranes by piezoelectric actuation and characterized a selected membrane design through a set of experiments including X-ray diffraction (XRD), residual stress and frequency analyses.

AB - In our previous work, we presented a novel technique for fabricating Transmission Electron Microscopy (TEM) chips in order to investigate structural and piezoelectric properties of Pulsed Laser Deposited (PLD) Lead Zirconium Titanate (Pb(Zr,Ti)O3) (PZT) thin films. We accomplished the fabrication of the devices we presented last year and obtained fully functional PLD PZT membranes. In this paper, we present the results of the fabrication process, which involves silicon-on-insulator (SOI) wafer technology together with deep reactive ion etching (DRIE) and highly selective etchants. In addition, we demonstrate the functionality of the membranes by piezoelectric actuation and characterized a selected membrane design through a set of experiments including X-ray diffraction (XRD), residual stress and frequency analyses.

KW - EWI-22525

KW - TST-SENSORS

KW - TST-ACTUATORS

KW - Frequency Response

KW - MEMS

KW - METIS-293195

KW - Residual Stress

KW - Pulsed Laser Deposition (PLD)

KW - Thin Film Membrane

KW - IR-82693

KW - Lead Zirconium Titanate (PZT)

M3 - Conference contribution

SN - 978-3-938843-71-0

SP - C9

BT - 23rd Micromechanics and Microsystems Europe Workshop, MME 2012

PB - Ilmenau University of Technology

CY - Ilmenau

T2 - 23rd Micromechanics and Microsystems Europe Workshop, MME 2012

Y2 - 9 September 2012 through 12 September 2012

ER -