Characterization of porous silicon layer structures by spectroellipsometry

T. Lohner, D.J. Wentink, E. Vazsonyi, M. Fried

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Publication statusPublished - 7 Nov 1997
Event2nd Japan-Central Europe Joint Workshop on Modeling of Materials and Combustion 1996 - Budapest, Hungary
Duration: 7 Nov 19969 Nov 1996
Conference number: 2

Workshop

Workshop2nd Japan-Central Europe Joint Workshop on Modeling of Materials and Combustion 1996
CountryHungary
CityBudapest
Period7/11/969/11/96

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