Characterization of porous silicon layer structures by spectroellipsometry

T. Lohner, D.J. Wentink, E. Vazsonyi, M. Fried

Research output: Contribution to conferencePoster

Original languageEnglish
Publication statusPublished - 7 Nov 1997
Event2nd Japan-Central Europe Joint Workshop on Modeling of Materials and Combustion 1996 - Budapest, Hungary
Duration: 7 Nov 19969 Nov 1996
Conference number: 2

Workshop

Workshop2nd Japan-Central Europe Joint Workshop on Modeling of Materials and Combustion 1996
CountryHungary
CityBudapest
Period7/11/969/11/96

Cite this

Lohner, T., Wentink, D. J., Vazsonyi, E., & Fried, M. (1997). Characterization of porous silicon layer structures by spectroellipsometry. Poster session presented at 2nd Japan-Central Europe Joint Workshop on Modeling of Materials and Combustion 1996, Budapest, Hungary.