Characterization of Pulsed Laser Deposited AL2 0 3 Gate Dielectric

R.G. Bankras, J. Holleman, P.H. Woerlee

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of 5th Annual Workshop on Semiconductors Advances for Future Electronics SAFE 2002
    Place of PublicationUtrecht, The Netherlands
    PublisherSTW
    Pages1-4
    Number of pages4
    ISBN (Print)90-73461-33-2
    Publication statusPublished - 27 Nov 2002

    Keywords

    • METIS-207619

    Cite this

    Bankras, R. G., Holleman, J., & Woerlee, P. H. (2002). Characterization of Pulsed Laser Deposited AL2 0 3 Gate Dielectric. In Proceedings of 5th Annual Workshop on Semiconductors Advances for Future Electronics SAFE 2002 (pp. 1-4). Utrecht, The Netherlands: STW.