Characterization of Silicon-Based Insulated Channels for Capillary Electrophoresis

Yolanda Fintschenko, Patrick Fowler, Vincent Spiering, Gert-Jan Burger, Albert van den Berg

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic


    A new fabrication method to produce miniaturized Transparent Insulating Channels (μTICs) is presented. The process involves Deep Reactive Ion Etching (DRIE), insulating film deposition, anodic bonding and back etching of the silicon. The μTIC process leaves optically transparent channels that can be cooled very easily due to the thin walls, thus in principle enabling higher electric field strengths. Because the fragile nature of thin walls limits the practical application of the μTICs, a polymer film is added to reinforce the microstructures. A μTIC design with an injection- and separation channel and containing a 100 μm long injection loop is realized and evaluated. EOF was confirmed by the use of fluorescently labeled, 3 μm diameter beads observed by a CCD camera coupled to a fluorescence microscope. Current/voltage curves were linear up to applied fields of 700 V/cm. For the first time, siliconbased microchannels have been realized that are suitable for CE. Thus, μTICs allow for high flexibility in the design of insulated channels with respect to dimensions and cross-sectional shapes for analytical techniques where insulating materials are required, such as CE.
    Original languageEnglish
    Title of host publicationMicro Total Analysis Systems '98
    Subtitle of host publicationProceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998
    EditorsD. Jed Harrison, Albert van den Berg
    Place of PublicationDordrecht
    PublisherKluwer Academic Publishers
    ISBN (Electronic)978-94-011-5286-0
    ISBN (Print)978-94-010-6225-1
    Publication statusPublished - 1998
    Event3rd International Workshop on Micro Total Analysis Systems, μTAS 1998 - Banff, Canada
    Duration: 13 Oct 199816 Oct 1998
    Conference number: 3


    Workshop3rd International Workshop on Micro Total Analysis Systems, μTAS 1998
    Abbreviated titleMicroTAS


    • METIS-112474
    • IR-15592
    • Capillary electrophoresis
    • Silicon
    • microtechnology
    • chemical separation


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