Characterization of stiction effects of an electrostatic micro positioner for probe storage

M. Patrascu, Stefano Stramigioli

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    2 Citations (Scopus)
    53 Downloads (Pure)

    Abstract

    We start by presenting a short explanation of the micro actuator working principle. The main contribution of this paper is the characterization of the coefcient of stiction between two silicon nitride parts of a MEMS actuator. Having one at contact surface while the other is composed of many relatively sharp circular bumps, has the advantage that the effective contact area is drastically reduced. The stiction coefcient varies between 0-0.53 for the device conguration presented. The exact value depends closely on the electrostatically applied force which presses the textured part on to the smooth one. Individual measurements used are highly accurate (typically within 5 nm noise band) and identical measurements for the characterization of stiction show only a small variation, typically under 25nm on a range of 11.8m.
    Original languageUndefined
    Title of host publicationInternational MEMS Conference 2006
    PublisherIOP Publishing
    Pages818-823
    Number of pages6
    DOIs
    Publication statusPublished - May 2006

    Publication series

    NameJournal of Physics: Conference Series
    PublisherIOP
    Number06EX1521
    Volume34
    ISSN (Print)1742-6588
    ISSN (Electronic)1742-6596

    Keywords

    • EWI-7978
    • IR-66568
    • METIS-238272

    Cite this

    Patrascu, M., & Stramigioli, S. (2006). Characterization of stiction effects of an electrostatic micro positioner for probe storage. In International MEMS Conference 2006 (pp. 818-823). [10.1088/1742-6596/34/1/135] (Journal of Physics: Conference Series; Vol. 34, No. 06EX1521). IOP Publishing. https://doi.org/10.1088/1742-6596/34/1/135