Characterization of stiction effects of an electrostatic micro positioner for probe storage

M. Patrascu, Stefano Stramigioli

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)
38 Downloads (Pure)

Abstract

We start by presenting a short explanation of the micro actuator working principle. The main contribution of this paper is the characterization of the coefcient of stiction between two silicon nitride parts of a MEMS actuator. Having one at contact surface while the other is composed of many relatively sharp circular bumps, has the advantage that the effective contact area is drastically reduced. The stiction coefcient varies between 0-0.53 for the device conguration presented. The exact value depends closely on the electrostatically applied force which presses the textured part on to the smooth one. Individual measurements used are highly accurate (typically within 5 nm noise band) and identical measurements for the characterization of stiction show only a small variation, typically under 25nm on a range of 11.8m.
Original languageUndefined
Title of host publicationInternational MEMS Conference 2006
PublisherIOP Publishing
Pages818-823
Number of pages6
DOIs
Publication statusPublished - May 2006

Publication series

NameJournal of Physics: Conference Series
PublisherIOP
Number06EX1521
Volume34
ISSN (Print)1742-6588
ISSN (Electronic)1742-6596

Keywords

  • EWI-7978
  • IR-66568
  • METIS-238272

Cite this

Patrascu, M., & Stramigioli, S. (2006). Characterization of stiction effects of an electrostatic micro positioner for probe storage. In International MEMS Conference 2006 (pp. 818-823). [10.1088/1742-6596/34/1/135] (Journal of Physics: Conference Series; Vol. 34, No. 06EX1521). IOP Publishing. https://doi.org/10.1088/1742-6596/34/1/135
Patrascu, M. ; Stramigioli, Stefano. / Characterization of stiction effects of an electrostatic micro positioner for probe storage. International MEMS Conference 2006. IOP Publishing, 2006. pp. 818-823 (Journal of Physics: Conference Series; 06EX1521).
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abstract = "We start by presenting a short explanation of the micro actuator working principle. The main contribution of this paper is the characterization of the coefcient of stiction between two silicon nitride parts of a MEMS actuator. Having one at contact surface while the other is composed of many relatively sharp circular bumps, has the advantage that the effective contact area is drastically reduced. The stiction coefcient varies between 0-0.53 for the device conguration presented. The exact value depends closely on the electrostatically applied force which presses the textured part on to the smooth one. Individual measurements used are highly accurate (typically within 5 nm noise band) and identical measurements for the characterization of stiction show only a small variation, typically under 25nm on a range of 11.8m.",
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Patrascu, M & Stramigioli, S 2006, Characterization of stiction effects of an electrostatic micro positioner for probe storage. in International MEMS Conference 2006., 10.1088/1742-6596/34/1/135, Journal of Physics: Conference Series, no. 06EX1521, vol. 34, IOP Publishing, pp. 818-823. https://doi.org/10.1088/1742-6596/34/1/135

Characterization of stiction effects of an electrostatic micro positioner for probe storage. / Patrascu, M.; Stramigioli, Stefano.

International MEMS Conference 2006. IOP Publishing, 2006. p. 818-823 10.1088/1742-6596/34/1/135 (Journal of Physics: Conference Series; Vol. 34, No. 06EX1521).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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N2 - We start by presenting a short explanation of the micro actuator working principle. The main contribution of this paper is the characterization of the coefcient of stiction between two silicon nitride parts of a MEMS actuator. Having one at contact surface while the other is composed of many relatively sharp circular bumps, has the advantage that the effective contact area is drastically reduced. The stiction coefcient varies between 0-0.53 for the device conguration presented. The exact value depends closely on the electrostatically applied force which presses the textured part on to the smooth one. Individual measurements used are highly accurate (typically within 5 nm noise band) and identical measurements for the characterization of stiction show only a small variation, typically under 25nm on a range of 11.8m.

AB - We start by presenting a short explanation of the micro actuator working principle. The main contribution of this paper is the characterization of the coefcient of stiction between two silicon nitride parts of a MEMS actuator. Having one at contact surface while the other is composed of many relatively sharp circular bumps, has the advantage that the effective contact area is drastically reduced. The stiction coefcient varies between 0-0.53 for the device conguration presented. The exact value depends closely on the electrostatically applied force which presses the textured part on to the smooth one. Individual measurements used are highly accurate (typically within 5 nm noise band) and identical measurements for the characterization of stiction show only a small variation, typically under 25nm on a range of 11.8m.

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Patrascu M, Stramigioli S. Characterization of stiction effects of an electrostatic micro positioner for probe storage. In International MEMS Conference 2006. IOP Publishing. 2006. p. 818-823. 10.1088/1742-6596/34/1/135. (Journal of Physics: Conference Series; 06EX1521). https://doi.org/10.1088/1742-6596/34/1/135