We start by presenting a short explanation of the micro actuator working principle. The main contribution of this paper is the characterization of the coefcient of stiction between two silicon nitride parts of a MEMS actuator. Having one at contact surface while the other is composed of many relatively sharp circular bumps, has the advantage that the effective contact area is drastically reduced. The stiction coefcient varies between 0-0.53 for the device conguration presented. The exact value depends closely on the electrostatically applied force which presses the textured part on to the smooth one. Individual measurements used are highly accurate (typically within 5 nm noise band) and identical measurements for the characterization of stiction show only a small variation, typically under 25nm on a range of 11.8m.
|Name||Journal of Physics: Conference Series|
|Conference||International MEMS Conference 2006, Singapore|
|Period||1/05/06 → …|