Abstract
| Original language | Undefined |
|---|---|
| Title of host publication | International MEMS Conference 2006 |
| Publisher | IOP Publishing |
| Pages | 818-823 |
| Number of pages | 6 |
| DOIs | |
| Publication status | Published - May 2006 |
Publication series
| Name | Journal of Physics: Conference Series |
|---|---|
| Publisher | IOP |
| Number | 06EX1521 |
| Volume | 34 |
| ISSN (Print) | 1742-6588 |
| ISSN (Electronic) | 1742-6596 |
Keywords
- EWI-7978
- IR-66568
- METIS-238272
Cite this
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Characterization of stiction effects of an electrostatic micro positioner for probe storage. / Patrascu, M.; Stramigioli, Stefano.
International MEMS Conference 2006. IOP Publishing, 2006. p. 818-823 10.1088/1742-6596/34/1/135 (Journal of Physics: Conference Series; Vol. 34, No. 06EX1521).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
TY - GEN
T1 - Characterization of stiction effects of an electrostatic micro positioner for probe storage
AU - Patrascu, M.
AU - Stramigioli, Stefano
N1 - eemcs-eprint-7978
PY - 2006/5
Y1 - 2006/5
N2 - We start by presenting a short explanation of the micro actuator working principle. The main contribution of this paper is the characterization of the coefcient of stiction between two silicon nitride parts of a MEMS actuator. Having one at contact surface while the other is composed of many relatively sharp circular bumps, has the advantage that the effective contact area is drastically reduced. The stiction coefcient varies between 0-0.53 for the device conguration presented. The exact value depends closely on the electrostatically applied force which presses the textured part on to the smooth one. Individual measurements used are highly accurate (typically within 5 nm noise band) and identical measurements for the characterization of stiction show only a small variation, typically under 25nm on a range of 11.8m.
AB - We start by presenting a short explanation of the micro actuator working principle. The main contribution of this paper is the characterization of the coefcient of stiction between two silicon nitride parts of a MEMS actuator. Having one at contact surface while the other is composed of many relatively sharp circular bumps, has the advantage that the effective contact area is drastically reduced. The stiction coefcient varies between 0-0.53 for the device conguration presented. The exact value depends closely on the electrostatically applied force which presses the textured part on to the smooth one. Individual measurements used are highly accurate (typically within 5 nm noise band) and identical measurements for the characterization of stiction show only a small variation, typically under 25nm on a range of 11.8m.
KW - EWI-7978
KW - IR-66568
KW - METIS-238272
U2 - 10.1088/1742-6596/34/1/135
DO - 10.1088/1742-6596/34/1/135
M3 - Conference contribution
T3 - Journal of Physics: Conference Series
SP - 818
EP - 823
BT - International MEMS Conference 2006
PB - IOP Publishing
ER -