Characterization of stiction effects of an electrostatic micro positioner for probe storage

M. Patrascu, Stefano Stramigioli

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    2 Citations (Scopus)
    101 Downloads (Pure)


    We start by presenting a short explanation of the micro actuator working principle. The main contribution of this paper is the characterization of the coefcient of stiction between two silicon nitride parts of a MEMS actuator. Having one at contact surface while the other is composed of many relatively sharp circular bumps, has the advantage that the effective contact area is drastically reduced. The stiction coefcient varies between 0-0.53 for the device conguration presented. The exact value depends closely on the electrostatically applied force which presses the textured part on to the smooth one. Individual measurements used are highly accurate (typically within 5 nm noise band) and identical measurements for the characterization of stiction show only a small variation, typically under 25nm on a range of 11.8m.
    Original languageUndefined
    Title of host publicationInternational MEMS Conference 2006
    PublisherInstitute of Physics (IOP)
    Number of pages6
    Publication statusPublished - May 2006
    EventInternational MEMS Conference 2006, Singapore: International MEMS Conference 2006 -
    Duration: 1 May 2006 → …

    Publication series

    NameJournal of Physics: Conference Series
    ISSN (Print)1742-6588
    ISSN (Electronic)1742-6596


    ConferenceInternational MEMS Conference 2006, Singapore
    Period1/05/06 → …


    • EWI-7978
    • IR-66568
    • METIS-238272

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